A modular neural network for R2R diagnosis of semiconductor fabrication equipment: a reactive ion etching application

2004 ◽  
Author(s):  
Sang Jeen Hong ◽  
G.S. May ◽  
Sungwon Park ◽  
Dong-Chul Park
Keyword(s):  
Neural Network ◽  
Reactive Ion Etching ◽  
Ion Etching ◽  
Modular Neural Network ◽  
Semiconductor Fabrication

Reactive ion etching profile and depth characterization using statistical and neural network analysis of light scattering data

1993 ◽  
Vol 74 (6) ◽  
pp. 3698-3706 ◽  
Author(s):  
Richard Krukar ◽  
Avi Kornblit ◽  
Linda A. Clark ◽  
Joseph Kruskal ◽  
Diane Lambert ◽  
...  
Keyword(s):  
Neural Network ◽  
Light Scattering ◽  
Network Analysis ◽  
Reactive Ion Etching ◽  
Scattering Data ◽  
Neural Network Analysis ◽  
Ion Etching ◽  
Etching Profile

Magnetron Reactive Ion Etching of GaAs and AIGaAs in CH4/H2/Ar Plasmas.

1996 ◽  
Author(s):  
George F. McLane ◽  
Paul Cooke ◽  
Robert P. Moerkirk
Keyword(s):  
Reactive Ion Etching ◽  
Ion Etching
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