Neural network based time series modeling of optical emission spectroscopy data for fault detection in reactive ion etching
2003 ◽
Vol 16
(4)
◽
pp. 598-608
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2005 ◽
Vol 52
(4)
◽
pp. 1063-1072
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Keyword(s):
2009 ◽
Vol 209
(5)
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pp. 2620-2626
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Keyword(s):
2000 ◽
Vol 54
(3-4)
◽
pp. 303-314
◽
2002 ◽
Vol 46
(11)
◽
pp. 1959-1963
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2001 ◽
Vol 40
(Part 2, No. 4A)
◽
pp. L313-L315
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2003 ◽
Vol 433-436
◽
pp. 693-696