CMP Defect Reduction and Mitigation: Practices and Future Trends

Author(s):  
Wei-Tsu Tseng ◽  
Carol Boye ◽  
Claire Silvestre ◽  
James H.-C. Chen ◽  
Fee li Lie ◽  
...  
Author(s):  
P. Roitman ◽  
B. Cordts ◽  
S. Visitserngtrakul ◽  
S.J. Krause

Synthesis of a thin, buried dielectric layer to form a silicon-on-insulator (SOI) material by high dose oxygen implantation (SIMOX – Separation by IMplanted Oxygen) is becoming an important technology due to the advent of high current (200 mA) oxygen implanters. Recently, reductions in defect densities from 109 cm−2 down to 107 cm−2 or less have been reported. They were achieved with a final high temperature annealing step (1300°C – 1400°C) in conjunction with: a) high temperature implantation or; b) channeling implantation or; c) multiple cycle implantation. However, the processes and conditions for reduction and elimination of precipitates and defects during high temperature annealing are not well understood. In this work we have studied the effect of annealing temperature on defect and precipitate reduction for SIMOX samples which were processed first with high temperature, high current implantation followed by high temperature annealing.


2001 ◽  
Vol 120 (5) ◽  
pp. A30-A30
Author(s):  
J HELM ◽  
J BARTHEL ◽  
D COPPOLA ◽  
P LAZARUS ◽  
S LUTHER ◽  
...  

1996 ◽  
Vol 41 (5) ◽  
pp. 466-467
Author(s):  
Lori A. Ingram
Keyword(s):  

2001 ◽  
Vol 89 ◽  
pp. 31-33
Author(s):  
L. Flandin ◽  
Y. Bréchet ◽  
J.Y. Cavaillé

Author(s):  
Shreya Joshi ◽  
Ms Bhavyaa ◽  
Suhani Gupta ◽  
Lalita Luthra

Blockchain is considered to be a disruptive core technology. Although many researchers have realized the importance of blockchain, but the research of it is still emerging. It is the record-keeping technology behind bitcoin and is one of the hottest and fastest growing skills in the IT sector today. It serves as an immutable ledger which allows transactions to take place in a decentralized man Blockchain-based applications are rising up, covering numerous fields including finance, healthcare, product management, Internet of Things (IoT), and many more. However, there are still some challenges of blockchain technology such as scalability and security problems which need to be overcome. This paper comprises of a comprehensive study of Blockchain technology. We have included here a deep dive into how blockchains work, its architecture, consensus and various applications. Furthermore, technical challenges are briefly listed.


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