Virtual metrology for semiconductor manufacturing: Focus on transfer learning

Mapping Intimacies ◽

10.1109/case49439.2021.9551567 ◽

2021 ◽

Author(s):

Rebecca Clain ◽

Valeria Borodin ◽

Michel Juge ◽

Agnes Roussy

Keyword(s):

Transfer Learning ◽

Semiconductor Manufacturing ◽

Virtual Metrology

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A virtual metrology scheme for predicting CVD thickness in semiconductor manufacturing

Proceedings 2006 IEEE International Conference on Robotics and Automation, 2006. ICRA 2006. ◽

10.1109/robot.2006.1641849 ◽

2006 ◽

Cited By ~ 5

Author(s):

Tung-Ho Lin ◽

Ming-Hsiung Hung ◽

Rung-Chuan Lin ◽

Fan-Tien Cheng

Keyword(s):

Semiconductor Manufacturing ◽

Virtual Metrology

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Virtual metrology for run-to-run control in semiconductor manufacturing

Expert Systems with Applications ◽

10.1016/j.eswa.2010.08.040 ◽

2011 ◽

Vol 38 (3) ◽

pp. 2508-2522 ◽

Cited By ~ 60

Author(s):

Pilsung Kang ◽

Dongil Kim ◽

Hyoung-joo Lee ◽

Seungyong Doh ◽

Sungzoon Cho

Keyword(s):

Semiconductor Manufacturing ◽

Virtual Metrology

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CORAL Transfer Learning for Deep Learning-Based Virtual Metrology Modeling

Journal of the Korean Institute of Industrial Engineers ◽

10.7232/jkiie.2020.46.3.319 ◽

2020 ◽

Vol 46 (3) ◽

pp. 319-325

Author(s):

Seung Sup Chung ◽

Chang Hyun Lee ◽

Seoung Bum Kim

Keyword(s):

Deep Learning ◽

Transfer Learning ◽

Virtual Metrology

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Virtual metrology-based engineering chain management by multi-classification of quality using support vector machine for semiconductor manufacturing

International Journal of Industrial and Systems Engineering ◽

10.1504/ijise.2011.040763 ◽

2011 ◽

Vol 8 (1) ◽

pp. 1 ◽

Cited By ~ 2

Author(s):

Sumika Arima

Keyword(s):

Support Vector Machine ◽

Semiconductor Manufacturing ◽

Support Vector ◽

Chain Management ◽

Virtual Metrology ◽

Multi Classification

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An information-theory and Virtual Metrology-based approach to Run-to-Run semiconductor manufacturing control

2012 IEEE International Conference on Automation Science and Engineering (CASE) ◽

10.1109/coase.2012.6386416 ◽

2012 ◽

Cited By ~ 6

Author(s):

Gian Antonio Susto ◽

Andrea Schirru ◽

Simone Pampuri ◽

Giuseppe De Nicolao ◽

Alessandro Beghi

Keyword(s):

Information Theory ◽

Semiconductor Manufacturing ◽

Manufacturing Control ◽

Virtual Metrology

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A Prediction of Wafer Yield Using Product Fabrication Virtual Metrology Process Parameters in Semiconductor Manufacturing

Journal of the Korean Institute of Industrial Engineers ◽

10.7232/jkiie.2015.41.6.572 ◽

2015 ◽

Vol 41 (6) ◽

pp. 572-578 ◽

Cited By ~ 1

Author(s):

Wan Sik Nam ◽

Seoung Bum Kim

Keyword(s):

Process Parameters ◽

Semiconductor Manufacturing ◽

Virtual Metrology

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A virtual metrology approach for maintenance compensation to improve yield in semiconductor manufacturing

International Journal of Computational Intelligence Systems ◽

10.1080/18756891.2014.947116 ◽

2014 ◽

Vol 7 (sup2) ◽

pp. 66-73 ◽

Cited By ~ 2

Author(s):

Kuo-Yi Lin ◽

Chia-Yu Hsu ◽

Hui-Chun Yu

Keyword(s):

Semiconductor Manufacturing ◽

Virtual Metrology

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Multilevel Kernel Methods for Virtual Metrology in Semiconductor Manufacturing

IFAC Proceedings Volumes ◽

10.3182/20110828-6-it-1002.01339 ◽

2011 ◽

Vol 44 (1) ◽

pp. 11614-11621 ◽

Cited By ~ 5

Author(s):

Andrea Schirru ◽

Simone Pampuri ◽

Cristina De Luca ◽

Giuseppe De Nicolao

Keyword(s):

Kernel Methods ◽

Semiconductor Manufacturing ◽

Virtual Metrology

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An intelligent virtual metrology system with adaptive update for semiconductor manufacturing

Journal of Process Control ◽

10.1016/j.jprocont.2017.02.002 ◽

2017 ◽

Vol 52 ◽

pp. 66-74 ◽

Cited By ~ 16

Author(s):

Seokho Kang ◽

Pilsung Kang

Keyword(s):

Semiconductor Manufacturing ◽

Virtual Metrology ◽

Metrology System

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Gaussian Process Regression for Virtual Metrology-Enabled Run-to-Run Control in Semiconductor Manufacturing

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2017.2768241 ◽

2018 ◽

Vol 31 (1) ◽

pp. 12-21 ◽

Cited By ~ 2

Author(s):

Jian Wan ◽

Sean McLoone

Keyword(s):

Gaussian Process ◽

Semiconductor Manufacturing ◽

Gaussian Process Regression ◽

Virtual Metrology

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