AbstractWe have studied the effect of geometric factors on the polarization properties of verticalcavity surface-emitting lasers with tilted pillar structures. Laser pillars with circular, square, diamond, and rectangular shapes were formed using reactive ion beam etching, by tilting the substrate with an angle of 15° ∼ 30° toward the [110] or [110] direction. We measured the polarization characteristics for the devices of 10 ∼ 20 atm size. We observed that an effective geometric factor on the polarization selectivity in tilted pillar structures is an asymmetric shape of vertical-cavity rather than an anisotropic shape of device area in planar direction.
Folded Cavity Surface Emitting Lasers Fabricated by Focused Ion Beam Etching