Astigmatic aberration of grating pair and its use of astigmatic compensation

Author(s):  
Zhongyang Wang ◽  
Zhizhan Xu ◽  
Lingsong Yang
2003 ◽  
Author(s):  
Atsushi Wada ◽  
Yoko Miyamoto ◽  
Takumi Ohtani ◽  
Noboru Nishihara ◽  
Mitsuo Takeda

2001 ◽  
Author(s):  
Atsushi Wada ◽  
Yoko Miyamoto ◽  
Takumi Ohtani ◽  
Noboru Nishihara ◽  
Mitsuo Takeda

2014 ◽  
Vol 39 (14) ◽  
pp. 4068 ◽  
Author(s):  
Shang Wu ◽  
Xiao Yuan ◽  
Xiang Zhang ◽  
Jiansheng Feng ◽  
Kuaisheng Zou ◽  
...  

2018 ◽  
Vol 232 ◽  
pp. 03046
Author(s):  
Luqing Hu ◽  
Xianqing Lei ◽  
Xiaoyi Wang ◽  
Yadong Zhang ◽  
Xiaolin Zuo

In this paper, the working principle of the grating measurement system is combined with the Fourier analysis method of Moiré fringe to establish the mathematical model of the grating signal Lissajous figure to know the quality of the grating signal intuitively. The Mathematica numerical analysis software is used to obtain the graphics of the model, and the correctness of the relationship between the parameters of the grating measurement system and the Lissajous figure equation of the grating signal is verified. The influence of the grating pair angle α on the output voltage signal and Lissajous figure of the grating measurement system is studied. The results show that the intensity of the two-phase output electrical signal decreases gradually with the increase of the deviation of the angle α of the grating pair, but the equal-amplitude of the two-phase output electrical signal does not change; Meanwhile, the shape of the grating signal Lissajous figure gradually changes from the ideal circle to the non-ideal ellipse, until a straight line with a strip slope of 135° is formed.


2010 ◽  
Vol 49 (5) ◽  
pp. 052701 ◽  
Author(s):  
Ja-Hon Lin ◽  
Chih-Chieh Taso ◽  
Kuei-Chu Hsu ◽  
Kuei-Huei Lin ◽  
Yinchieh Lai

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