Patterning of Silicone Rubber for Micro-Electrode Array Fabrication

Author(s):  
Martin Schuettler ◽  
Christian Henle ◽  
Juan Ordonez ◽  
Gregg J. Suaning ◽  
Nigel H. Lovell ◽  
...  
2010 ◽  
Vol 455 ◽  
pp. 274-278
Author(s):  
X.S. Geng ◽  
Yu Kui Wang ◽  
Zhen Long Wang ◽  
De Bin Shan

This paper discusses a processing preparation for micro-electrode array fabrication by micro wire electrical discharge machining. Based on a self-developed micro-WEDM machine tool and adopted thin tungsten wire electrode of 30μm in diameter, a series of experiments on micro-electrode array machining are introduced. The relationship between the discharge gap and working area of wire discharge under given voltage is investigated. The examination for micro-girder structure forming process has gone along and the axle journal's minimized width of least micro girder which could not bring on machining flexural thermal deformation has been obtained. The clamping method of work-piece intended for electrode array fabrication is analyzed and a special fixture is designed. The factors affecting forming accuracy are summarized. An amounted 5×5 squared-disk-type micro-electrode array structure with a high aspect ration, namely 20μm in axle journal width and 500μm in length of a single electrode, has been machined successfully.


2012 ◽  
Vol 47 (5) ◽  
pp. 1209-1220 ◽  
Author(s):  
Jing Guo ◽  
Jie Yuan ◽  
Jiageng Huang ◽  
Jessica Ka-Yan Law ◽  
Chi-Kong Yeung ◽  
...  

2019 ◽  
Vol 99 ◽  
pp. 106595
Author(s):  
Michael Trujillo ◽  
Shuhei Noji ◽  
Yasuoka Satoko ◽  
Gary Cheng ◽  
Ikurou Suzuki

2014 ◽  
Vol 24 (3) ◽  
pp. 034003 ◽  
Author(s):  
S Khoshfetrat Pakazad ◽  
A Savov ◽  
A van de Stolpe ◽  
R Dekker

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