Dispatching rule considering time-constraints on processes for semiconductor wafer fabrication facility

2012 IEEE International Conference on Automation Science and Engineering (CASE) ◽

10.1109/coase.2012.6386370 ◽

2012 ◽

Author(s):

L. Li ◽

Y. F. Li ◽

Z. J. Sun

Keyword(s):

Wafer Fabrication ◽

Time Constraints ◽

Dispatching Rule ◽

Semiconductor Wafer ◽

Semiconductor Wafer Fabrication

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A generalized dispatching rule considering time-constraints on processes of a semiconductor wafer fabrication facility

2012 International Conference on System Simulation (ICUSS 2012) ◽

10.1049/cp.2012.0542 ◽

2012 ◽

Author(s):

Y.F. Li ◽

L. Li

Keyword(s):

Wafer Fabrication ◽

Time Constraints ◽

Dispatching Rule ◽

Semiconductor Wafer ◽

Semiconductor Wafer Fabrication

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Production Scheduling of Semiconductor Wafer Fabrication Facilities Using Real-Time Combinatorial Dispatching Rule

International Conference on Reliable Systems Engineering (ICoRSE) - 2021 - Lecture Notes in Networks and Systems ◽

10.1007/978-3-030-83368-8_8 ◽

2021 ◽

pp. 78-90

Author(s):

Suraj Panigrahi ◽

Srijeta Agrahari ◽

José Machado ◽

V. K. Manupati

Keyword(s):

Real Time ◽

Production Scheduling ◽

Wafer Fabrication ◽

Dispatching Rule ◽

Semiconductor Wafer ◽

Semiconductor Wafer Fabrication

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Implementation of modeling and simulation in semiconductor wafer fabrication with time constraints between wet etch and furnace operations

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/66.857935 ◽

2000 ◽

Vol 13 (3) ◽

pp. 273-277 ◽

Author(s):

W. Scholl ◽

J. Domaschke

Keyword(s):

Modeling And Simulation ◽

Wafer Fabrication ◽

Time Constraints ◽

Semiconductor Wafer ◽

Semiconductor Wafer Fabrication ◽

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A pull VPLs based release policy and dispatching rule for semiconductor wafer fabrication

2012 IEEE International Conference on Automation Science and Engineering (CASE) ◽

10.1109/coase.2012.6386320 ◽

2012 ◽

Author(s):

You Li ◽

Zhibin Jiang ◽

Wenyou Jia

Keyword(s):

Wafer Fabrication ◽

Dispatching Rule ◽

Semiconductor Wafer ◽

Release Policy ◽

Semiconductor Wafer Fabrication

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CAPACITY DETERMINATION MODEL WITH TIME CONSTRAINTS AND BATCH PROCESSING IN SEMICONDUCTOR WAFER FABRICATION

Journal of the Chinese Institute of Industrial Engineers ◽

10.1080/10170660609509008 ◽

2006 ◽

Vol 23 (3) ◽

pp. 192-199 ◽

Author(s):

Ying-Mei Tu ◽

Chuen-Shiuan Liou

Keyword(s):

Batch Processing ◽

Wafer Fabrication ◽

Time Constraints ◽

Semiconductor Wafer ◽

Semiconductor Wafer Fabrication ◽

Capacity Determination

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Capacity planning for semiconductor wafer fabrication with time constraints between operations

WSC'99. 1999 Winter Simulation Conference Proceedings. 'Simulation - A Bridge to the Future' (Cat. No.99CH37038) ◽

10.1145/324138.324545 ◽

1999 ◽

Author(s):

Jennifer K. Robinson ◽

Richard Giglio

Keyword(s):

Capacity Planning ◽

Wafer Fabrication ◽

Time Constraints ◽

Semiconductor Wafer ◽

Semiconductor Wafer Fabrication

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Implementation of modeling and simulation in semiconductor wafer fabrication with time constraints between wet etch and furnace operations

1999 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings (Cat No.99CH36314) ◽

10.1109/issm.1999.808738 ◽

2003 ◽

Author(s):

W. Scholl ◽

J. Domaschke

Keyword(s):

Modeling And Simulation ◽

Wafer Fabrication ◽

Time Constraints ◽

Semiconductor Wafer ◽

Semiconductor Wafer Fabrication ◽

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Off-line learning based adaptive dispatching rule for semiconductor wafer fabrication facility

2013 IEEE International Conference on Automation Science and Engineering (CASE) ◽

10.1109/coase.2013.6653974 ◽

2013 ◽

Author(s):

L. Li ◽

H. Xu

Keyword(s):

Wafer Fabrication ◽

Dispatching Rule ◽

Semiconductor Wafer ◽

Semiconductor Wafer Fabrication

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Adaptive Dispatching Rule for Semiconductor Wafer Fabrication Facility

IEEE Transactions on Automation Science and Engineering ◽

10.1109/tase.2012.2221087 ◽

2013 ◽

Vol 10 (2) ◽

pp. 354-364 ◽

Author(s):

Li Li ◽

Zijin Sun ◽

MengChu Zhou ◽

Fei Qiao

Keyword(s):

Wafer Fabrication ◽

Dispatching Rule ◽

Semiconductor Wafer ◽

Semiconductor Wafer Fabrication

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A mixed dispatching rule for semiconductor wafer fabrication

International Journal of Systems Science Operations & Logistics ◽

10.1080/23302674.2016.1244302 ◽

2016 ◽

Vol 5 (3) ◽

pp. 195-203 ◽

Author(s):

Yeu-Shiang Huang ◽

Hung-Wen Chen

Keyword(s):

Wafer Fabrication ◽

Dispatching Rule ◽

Semiconductor Wafer ◽

Semiconductor Wafer Fabrication

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