Production Scheduling of Semiconductor Wafer Fabrication Facilities Using Real-Time Combinatorial Dispatching Rule

International Conference on Reliable Systems Engineering (ICoRSE) - 2021 - Lecture Notes in Networks and Systems ◽

10.1007/978-3-030-83368-8_8 ◽

2021 ◽

pp. 78-90

Author(s):

Suraj Panigrahi ◽

Srijeta Agrahari ◽

José Machado ◽

V. K. Manupati

Keyword(s):

Real Time ◽

Production Scheduling ◽

Wafer Fabrication ◽

Dispatching Rule ◽

Semiconductor Wafer ◽

Semiconductor Wafer Fabrication

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Design of a lagrangian relaxation-based hierarchical production scheduling environment for semiconductor wafer fabrication

IEEE Transactions on Robotics and Automation ◽

10.1109/tra.2003.814512 ◽

2003 ◽

Vol 19 (4) ◽

pp. 566-578 ◽

Author(s):

Ting-Kai Hwang ◽

Shi-Chung Chang

Keyword(s):

Lagrangian Relaxation ◽

Production Scheduling ◽

Wafer Fabrication ◽

Semiconductor Wafer ◽

Semiconductor Wafer Fabrication

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An Extended Object-oriented Petri Nets Modeling Based Simulation Platform for Real-time Scheduling of Semiconductor Wafer Fabrication System

2006 IEEE International Conference on Systems, Man and Cybernetics ◽

10.1109/icsmc.2006.384646 ◽

2006 ◽

Author(s):

Huai Zhang ◽

Zhibin Jiang ◽

Chengtao Guo ◽

Huiran Liu

Keyword(s):

Real Time ◽

Object Oriented ◽

Wafer Fabrication ◽

Simulation Platform ◽

Semiconductor Wafer ◽

Real Time Scheduling ◽

Extended Object ◽

Semiconductor Wafer Fabrication ◽

Time Scheduling

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A decision support system of real time dispatching in semiconductor wafer fabrication with shortest process time in wet bench

2003 5th International Conference on ASIC. Proceedings (IEEE Cat. No.03TH8690) ◽

10.1109/issm.2003.1243287 ◽

2004 ◽

Author(s):

M.D. Hsieh ◽

Amos Lin ◽

Kenley Kuo ◽

H.L. Wang

Keyword(s):

Decision Support ◽

Decision Support System ◽

Real Time ◽

Support System ◽

Wafer Fabrication ◽

Process Time ◽

Semiconductor Wafer ◽

Semiconductor Wafer Fabrication

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Selection of dispatching rules on multiple dispatching decision points in real-time scheduling of a semiconductor wafer fabrication system

International Journal of Production Research ◽

10.1080/0020754031000118099 ◽

2003 ◽

Vol 41 (16) ◽

pp. 3921-3941 ◽

Author(s):

Hyeung-Sik Min ◽

Yuehwern Yih

Keyword(s):

Real Time ◽

Wafer Fabrication ◽

Dispatching Rules ◽

Semiconductor Wafer ◽

Real Time Scheduling ◽

Decision Points ◽

Semiconductor Wafer Fabrication ◽

Time Scheduling ◽

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Simplification methods for accelerating simulation-based real-time scheduling in a semiconductor wafer fabrication facility

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2003.811890 ◽

2003 ◽

Vol 16 (2) ◽

pp. 290-298 ◽

Author(s):

Yeong-Dae Kim ◽

Sang-Oh Shim ◽

Bum Choi ◽

Hark Hwang

Keyword(s):

Real Time ◽

Wafer Fabrication ◽

Semiconductor Wafer ◽

Real Time Scheduling ◽

Simulation Based ◽

Semiconductor Wafer Fabrication ◽

Time Scheduling

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A pull VPLs based release policy and dispatching rule for semiconductor wafer fabrication

2012 IEEE International Conference on Automation Science and Engineering (CASE) ◽

10.1109/coase.2012.6386320 ◽

2012 ◽

Author(s):

You Li ◽

Zhibin Jiang ◽

Wenyou Jia

Keyword(s):

Wafer Fabrication ◽

Dispatching Rule ◽

Semiconductor Wafer ◽

Release Policy ◽

Semiconductor Wafer Fabrication

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A decision support system of real time dispatching in semiconductor wafer fabrication with shortest process time in wet bench

Semiconductor Manufacturing Technology Workshop, 2002 ◽

10.1109/smtw.2002.1197449 ◽

2004 ◽

Author(s):

M.D. Hsieh ◽

Amos Lin ◽

Kenley Kuo ◽

H.L. Wang

Keyword(s):

Decision Support ◽

Decision Support System ◽

Real Time ◽

Support System ◽

Wafer Fabrication ◽

Process Time ◽

Semiconductor Wafer ◽

Semiconductor Wafer Fabrication

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Dispatching rule considering time-constraints on processes for semiconductor wafer fabrication facility

2012 IEEE International Conference on Automation Science and Engineering (CASE) ◽

10.1109/coase.2012.6386370 ◽

2012 ◽

Author(s):

L. Li ◽

Y. F. Li ◽

Z. J. Sun

Keyword(s):

Wafer Fabrication ◽

Time Constraints ◽

Dispatching Rule ◽

Semiconductor Wafer ◽

Semiconductor Wafer Fabrication

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A generalized dispatching rule considering time-constraints on processes of a semiconductor wafer fabrication facility

2012 International Conference on System Simulation (ICUSS 2012) ◽

10.1049/cp.2012.0542 ◽

2012 ◽

Author(s):

Y.F. Li ◽

L. Li

Keyword(s):

Wafer Fabrication ◽

Time Constraints ◽

Dispatching Rule ◽

Semiconductor Wafer ◽

Semiconductor Wafer Fabrication

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Production scheduling in a semiconductor wafer fabrication facility producing multiple product types with distinct due dates

IEEE Transactions on Robotics and Automation ◽

10.1109/70.964660 ◽

2001 ◽

Vol 17 (5) ◽

pp. 589-598 ◽

Author(s):

Yeong-Dae Kim ◽

Jae-Gon Kim ◽

Bum Choi ◽

Hyung-Un Kim

Keyword(s):

Production Scheduling ◽

Wafer Fabrication ◽

Due Dates ◽

Semiconductor Wafer ◽

Semiconductor Wafer Fabrication ◽

Multiple Product

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