Adaptive Dispatching Rule for Semiconductor Wafer Fabrication Facility

IEEE Transactions on Automation Science and Engineering ◽

10.1109/tase.2012.2221087 ◽

2013 ◽

Vol 10 (2) ◽

pp. 354-364 ◽

Author(s):

Li Li ◽

Zijin Sun ◽

MengChu Zhou ◽

Fei Qiao

Keyword(s):

Wafer Fabrication ◽

Dispatching Rule ◽

Semiconductor Wafer ◽

Semiconductor Wafer Fabrication

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Production Scheduling of Semiconductor Wafer Fabrication Facilities Using Real-Time Combinatorial Dispatching Rule

International Conference on Reliable Systems Engineering (ICoRSE) - 2021 - Lecture Notes in Networks and Systems ◽

10.1007/978-3-030-83368-8_8 ◽

2021 ◽

pp. 78-90

Author(s):

Suraj Panigrahi ◽

Srijeta Agrahari ◽

José Machado ◽

V. K. Manupati

Keyword(s):

Real Time ◽

Production Scheduling ◽

Wafer Fabrication ◽

Dispatching Rule ◽

Semiconductor Wafer ◽

Semiconductor Wafer Fabrication

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A pull VPLs based release policy and dispatching rule for semiconductor wafer fabrication

2012 IEEE International Conference on Automation Science and Engineering (CASE) ◽

10.1109/coase.2012.6386320 ◽

2012 ◽

Author(s):

You Li ◽

Zhibin Jiang ◽

Wenyou Jia

Keyword(s):

Wafer Fabrication ◽

Dispatching Rule ◽

Semiconductor Wafer ◽

Release Policy ◽

Semiconductor Wafer Fabrication

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Dispatching rule considering time-constraints on processes for semiconductor wafer fabrication facility

2012 IEEE International Conference on Automation Science and Engineering (CASE) ◽

10.1109/coase.2012.6386370 ◽

2012 ◽

Author(s):

L. Li ◽

Y. F. Li ◽

Z. J. Sun

Keyword(s):

Wafer Fabrication ◽

Time Constraints ◽

Dispatching Rule ◽

Semiconductor Wafer ◽

Semiconductor Wafer Fabrication

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A generalized dispatching rule considering time-constraints on processes of a semiconductor wafer fabrication facility

2012 International Conference on System Simulation (ICUSS 2012) ◽

10.1049/cp.2012.0542 ◽

2012 ◽

Author(s):

Y.F. Li ◽

L. Li

Keyword(s):

Wafer Fabrication ◽

Time Constraints ◽

Dispatching Rule ◽

Semiconductor Wafer ◽

Semiconductor Wafer Fabrication

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Off-line learning based adaptive dispatching rule for semiconductor wafer fabrication facility

2013 IEEE International Conference on Automation Science and Engineering (CASE) ◽

10.1109/coase.2013.6653974 ◽

2013 ◽

Author(s):

L. Li ◽

H. Xu

Keyword(s):

Wafer Fabrication ◽

Dispatching Rule ◽

Semiconductor Wafer ◽

Semiconductor Wafer Fabrication

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A mixed dispatching rule for semiconductor wafer fabrication

International Journal of Systems Science Operations & Logistics ◽

10.1080/23302674.2016.1244302 ◽

2016 ◽

Vol 5 (3) ◽

pp. 195-203 ◽

Author(s):

Yeu-Shiang Huang ◽

Hung-Wen Chen

Keyword(s):

Wafer Fabrication ◽

Dispatching Rule ◽

Semiconductor Wafer ◽

Semiconductor Wafer Fabrication

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A performance model of automated material handling systems with double closed-loops and shortcuts in 300 mm semiconductor wafer fabrication systems

Journal of Manufacturing Systems ◽

10.1016/j.jmsy.2020.12.006 ◽

2021 ◽

Vol 58 ◽

pp. 316-334

Author(s):

Lihui Wu ◽

Zhongwei Zhang ◽

Jie Zhang ◽

Ray Y. Zhong ◽

Junliang Wang

Keyword(s):

Material Handling ◽

Performance Model ◽

Wafer Fabrication ◽

Semiconductor Wafer ◽

Closed Loops ◽

Material Handling Systems ◽

Semiconductor Wafer Fabrication ◽

Automated Material Handling ◽

Automated Material Handling Systems ◽

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Scheduling semiconductor wafer fabrication

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/66.4384 ◽

1988 ◽

Vol 1 (3) ◽

pp. 115-130 ◽

Author(s):

L.M. Wein

Keyword(s):

Wafer Fabrication ◽

Semiconductor Wafer ◽

Semiconductor Wafer Fabrication

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AN ANALYSIS OF DISPATCHING RULES IN A SEMICONDUCTOR WAFER FABRICATION ENVIRONMENT

Journal of Electronics Manufacturing ◽

10.1142/s0960313195000190 ◽

1995 ◽

Vol 05 (03) ◽

pp. 165-174 ◽

Author(s):

THOMAS McCUTCHEN ◽

CHUNG-YEE LEE

Keyword(s):

Wafer Fabrication ◽

Dispatching Rules ◽

Semiconductor Wafer ◽

Semiconductor Wafer Fabrication

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Modeling of photolithography process in semiconductor wafer fabrication systems using extended hybrid Petri nets

Journal of Central South University of Technology ◽

10.1007/s11771-007-0077-1 ◽

2007 ◽

Vol 14 (3) ◽

pp. 393-398 ◽

Author(s):

Bing-hai Zhou ◽

Qing-zhi Pan ◽

Shi-jin Wang ◽

Bin Wu

Keyword(s):

Wafer Fabrication ◽

Semiconductor Wafer ◽

Hybrid Petri Nets ◽

Semiconductor Wafer Fabrication ◽

Photolithography Process

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