Study of CDSEM measurement issue caused by wafer charging

Author(s):  
Qiang Zhang ◽  
Guogui Deng ◽  
Bin Xing ◽  
Jingan Hao ◽  
Qiang Wu ◽  
...  
Author(s):  
H. Ito ◽  
T. Kamata ◽  
J. England ◽  
I. Fotheringham ◽  
F. Plumb ◽  
...  
Keyword(s):  

1990 ◽  
Author(s):  
Hirotaka MUTO ◽  
Haruhisa FUJII ◽  
Koichiro NAKANISHI ◽  
Shingo IKEDA

1992 ◽  
Vol 5 (4) ◽  
pp. 359-367 ◽  
Author(s):  
H. Inaba ◽  
T. Ohmi ◽  
M. Morita ◽  
M. Nakamura ◽  
T. Yoshida ◽  
...  
Keyword(s):  

2009 ◽  
Vol 10 (1) ◽  
pp. 125-139
Author(s):  
ZEN-U LUCIAN HOTTA ◽  
TAKASHI INOGUCHI

AbstractThis paper is one of the few attempts made by social scientists to measure social capital via psychometric approach, and is the only one of such kind to base its evidence on the AsiaBarometer survey data. After first reviewing the history of social capital, including its conceptual emergence and recent literatures, we expose the issue of difficulty in the measurement of social capital despite its topical popularity. We tackle this measurement issue by applying psychometric procedures to the AsiaBarometer survey data of 2004, 2005, and 2006, focusing on questions pertaining to social capital of ordinary individuals residing in the 29 survey societies. This paper is significant in two aspects. First, using simple statistical procedures, it extracts various dimensions of social capital without first knowing what dimensions to extract. In short, it does not try to measure social capital using some kind of pre-defined concepts such as those outlined in the historical review of our predecessors. Rather, it succeeds in manifesting key factors of social capital – altruism, utilitarianism, communitarianism, and concordance with prevailing regime – by mechanically processing collective responses by individual respondents towards survey questions oriented with social capital. Though the paper does not aim to establish its methodology as a widely held consensus on how to measure social capital, it does give credence and recognition to psychometric approaches as effectives means to measure social capital, which, by its very definition, calls for ‘objective’ approaches using collective data to measure ‘subjective’ notions of individual actions within networks. Second, this paper is the first systematic empirical analysis of social capital in all the subregions of Asia, i.e. East, Southeast, South, and Central. It builds on our earlier works, including the 2006 paper on social capital in Central and South Asia, and gives empirical credence to important concepts on Asian political culture.


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