A CMOS sensor signal conditioner for an automotive pressure sensor based on a piezo-resistive bridge transducer

Author(s):  
H. Solar ◽  
A. Beriain ◽  
A. Jimenez-Irastorza ◽  
U. Alvarado ◽  
R. Berenguer ◽  
...  
2019 ◽  
Vol 19 (23) ◽  
pp. 11072-11080 ◽  
Author(s):  
Mika-Matti Laurila ◽  
Mikko Peltokangas ◽  
Karem Lozano Montero ◽  
Tuomo Siponkoski ◽  
Jari Juuti ◽  
...  

2009 ◽  
Vol 60-61 ◽  
pp. 119-124
Author(s):  
Ren Cheng Jin ◽  
Wu Jin Zhang ◽  
Zhe Nan Tang ◽  
Jia Qi Wang ◽  
Ming Liang Shao

The effect of micro-hotplate (MHP) thermal deformation on the signal output of the MHP-based micro gas pressure sensor is investigated. Combining electro-thermal theoretical analysis and thermal-mechanical finite element modeling, different electro-thermal-mechanical analysis models of the sensors are built and solved at constant current condition and constant temperature condition respectively. The calculated results show that the MHP thermal deformation has little effect on the sensor signal output over the entire pressure range at constant current condition, I=0.7mA. While at constant temperature condition, Ts=400K, thermal deformation has little effect on the sensor signal output at low gas pressure, but at high pressure the effect are great. Moreover, according to the thermal-mechanical analysis, we find that optimizing thickness distribution of thin films in the MHP suspended structure can reduce thermal deformation effectively at higher temperature when the lateral dimension is same, which presents a practicable method to improve the sensor stability.


2012 ◽  
Vol 24 ◽  
pp. 2143-2150 ◽  
Author(s):  
Xin Shi ◽  
Xiang-mo Zhao ◽  
Fei Hui ◽  
Lan Yang

2011 ◽  
Vol 131 (9) ◽  
pp. 1518-1527
Author(s):  
Hiromi Maruyama ◽  
Harutoyo Hirano ◽  
Abdugheni Kutluk ◽  
Toshio Tsuji ◽  
Osamu Fukuda ◽  
...  

2010 ◽  
Vol 130 (5) ◽  
pp. 170-175
Author(s):  
Tsukasa Fujimori ◽  
Hideaki Takano ◽  
Yuko Hanaoka ◽  
Yasushi Goto

2019 ◽  
Vol 139 (4) ◽  
pp. 63-68
Author(s):  
Hiroshi Nakano ◽  
Masahiro Matsumoto ◽  
Yasuo Onose ◽  
Kazuhiro Ohta

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