Metal Strain Gauge Pressure Sensor Using SiO2/Si3N4 Diaphragm
2019 ◽
Vol 139
(4)
◽
pp. 63-68
Keyword(s):
2001 ◽
Vol 12
(3)
◽
pp. 335-344
◽
Keyword(s):
Keyword(s):
1989 ◽
Vol 25
(5)
◽
pp. 524-530
◽
1990 ◽
Vol 23
(1-3)
◽
pp. 1007-1010
◽
2018 ◽
Vol 24
(7)
◽
pp. 2969-2981
◽
Keyword(s):
2018 ◽
Vol 19
(6)
◽
pp. 793-800
◽