First demonstration of vacuum-sealed fully integrated BEOL-compatible field emission devices for Si integrated high voltage applications

Author(s):  
Nishita Deka ◽  
Vivek Subramanian
Author(s):  
N. F. Ziegler

A high-voltage terminal has been constructed for housing the various power supplies and metering circuits required by the field-emission gun (described elsewhere in these Proceedings) for the high-coherence microscope. The terminal is cylindrical in shape having a diameter of 14 inches and a length of 24 inches. It is completely enclosed by an aluminum housing filled with Freon-12 gas at essentially atmospheric pressure. The potential of the terminal relative to ground is, of course, equal to the accelerating potential of the microscope, which in the present case, is 150 kilovolts maximum.


Measurement ◽  
2016 ◽  
Vol 93 ◽  
pp. 208-214 ◽  
Author(s):  
Maycon M. Kopelvski ◽  
Elisabete Galeazzo ◽  
Henrique E.M. Peres ◽  
Francisco J. Ramirez-Fernandez ◽  
Débora A.C. Silva ◽  
...  

1997 ◽  
Vol 15 (3) ◽  
pp. 1733-1738 ◽  
Author(s):  
V. V. Zhirnov ◽  
G. J. Wojak ◽  
W. B. Choi ◽  
J. J. Cuomo ◽  
J. J. Hren

Author(s):  
Maycon M. Kopelvski ◽  
Elisabete Galeazzo ◽  
Henrique E. M. Peres ◽  
Francisco J. Ramirez-Fernandez ◽  
Michel O. S. Dantas

2007 ◽  
Vol 78 (4) ◽  
pp. 043103 ◽  
Author(s):  
Gregor H. Welsh ◽  
David A. Turton ◽  
David R. Jones ◽  
Dino A. Jaroszynski ◽  
Klaas Wynne

2004 ◽  
Vol 13 (4-8) ◽  
pp. 975-981 ◽  
Author(s):  
W.P. Kang ◽  
J.L. Davidson ◽  
Y.M. Wong ◽  
K. Holmes

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