First demonstration of vacuum-sealed fully integrated BEOL-compatible field emission devices for Si integrated high voltage applications
2020 ◽
Vol 67
(9)
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pp. 3753-3760
1972 ◽
Vol 30
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pp. 428-429
1997 ◽
Vol 15
(3)
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pp. 1733-1738
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2007 ◽
Vol 78
(4)
◽
pp. 043103
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Keyword(s):
2004 ◽
Vol 13
(4-8)
◽
pp. 975-981
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