Three Dimensional Modeling of Piezoelectric Micromachined Transducers Built on Top of Integrated Circuits

Author(s):  
Kevin Chan ◽  
Mihir Patel ◽  
Nuria Barniol ◽  
Shomnath Bhowmick ◽  
Sebastien Cases ◽  
...  
2011 ◽  
Vol 56 (3) ◽  
pp. 766-770 ◽  
Author(s):  
Delphine Tardivo ◽  
Julien Sastre ◽  
Michel Ruquet ◽  
Lionel Thollon ◽  
Pascal Adalian ◽  
...  

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