Comprehensive characterization of Surface acoustic wave trapping in a periodic array of high aspect ratio electrodes

2007 ◽  
Author(s):  
J. Masson ◽  
V. Laude ◽  
L. Robert ◽  
W. Daniau ◽  
A. Khelif ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
High Aspect Ratio ◽  
Periodic Array ◽  
Wave Trapping ◽  
Comprehensive Characterization

Surface acoustic wave guiding in a diffractionless high aspect ratio transducer

2013 ◽  
Vol 102 (11) ◽  
pp. 113508 ◽  
Author(s):  
Ludovic Socié ◽  
Sarah Benchabane ◽  
Laurent Robert ◽  
Abdelkrim Khelif ◽  
Vincent Laude
Keyword(s):  
Aspect Ratio ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
High Aspect Ratio

Surface acoustic wave trapping in a periodic array of mechanical resonators

2006 ◽  
Vol 89 (8) ◽  
pp. 083515 ◽  
Author(s):  
Vincent Laude ◽  
Laurent Robert ◽  
William Daniau ◽  
Abdelkrim Khelif ◽  
Sylvain Ballandras
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Periodic Array ◽  
Mechanical Resonators ◽  
Wave Trapping

Submicron-scale surface acoustic wave resonators fabricated by high aspect ratio X-ray lithography and aluminum lift-off

2008 ◽  
Vol 14 (9-11) ◽  
pp. 1715-1719 ◽  
Author(s):  
Sven Achenbach ◽  
David Klymyshyn ◽  
Timo Mappes ◽  
Anton Kachayev ◽  
Venkat Subramanian ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
High Aspect Ratio ◽  
X Ray ◽  
Submicron Scale ◽  
Lift Off ◽  
Acoustic Wave Resonators ◽  
Scale Surface

Fabrication and electrical characterization of high aspect ratio poly-silicon filled through-silicon vias

2012 ◽  
Vol 22 (5) ◽  
pp. 055021 ◽  
Author(s):  
Pradeep Dixit ◽  
Tapani Vehmas ◽  
Sami Vähänen ◽  
Philippe Monnoyer ◽  
Kimmo Henttinen
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Electrical Characterization ◽  
Through Silicon Vias ◽  
Poly Silicon ◽  
Silicon Vias
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