scholarly journals Garnet multilayer thin film structure with magnetostatically-altered and improved magnetic properties prepared by RF magnetron sputtering

2011 ◽  
Author(s):  
Mohammad Nur-E-Alam ◽  
Mikhail Vasiliev ◽  
Viacheslav Kotov ◽  
Kamal Alameh
Keyword(s):  
Thin Film ◽  
Magnetic Properties ◽  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Film Structure ◽  
Multilayer Thin Film ◽  
Thin Film Structure

Development of a process modeling for residual stress assessment of multilayer thin film structure

2015 ◽  
Vol 584 ◽  
pp. 146-153 ◽  
Author(s):  
H.J. Wang ◽  
H.A. Deng ◽  
S.Y. Chiang ◽  
Y.F. Su ◽  
K.N. Chiang
Keyword(s):  
Thin Film ◽  
Residual Stress ◽  
Process Modeling ◽  
Film Structure ◽  
Multilayer Thin Film ◽  
Stress Assessment ◽  
Thin Film Structure
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