Nonlinear friction compensation for a high precision stage using synchronous piezoelectric device driver

2009 ◽  
Author(s):  
Kazuhiro Tsuruta ◽  
Kazuya Sato ◽  
Nobuhiro Ushimi ◽  
Kouji Kosaka
Keyword(s):  
High Precision ◽  
Device Driver ◽  
Friction Compensation ◽  
Nonlinear Friction ◽  
Precision Stage ◽  
Piezoelectric Device

scholarly journals Accurate Friction Compensation for a High Precision Stage using a Synchronous Piezoelectric Device Driver

2007 ◽  
Vol 127 (1) ◽  
pp. 44-51 ◽  
Author(s):  
Truong Ngoc Minh ◽  
Kiyoshi Ohishi ◽  
Masasuke Takata ◽  
Seiji Hashimoto ◽  
Kouji Kosaka ◽  
...  
Keyword(s):  
High Precision ◽  
Device Driver ◽  
Friction Compensation ◽  
Precision Stage ◽  
Piezoelectric Device

615 Fast Motion Control of a High Precision Stage using a Synchronous Piezoelectric Device Driver

2005 ◽  
Vol 2005 (0) ◽  
pp. _615-1_-_615-6_
Author(s):  
Truong Ngoc MINH ◽  
Atsushi KAMIMURA ◽  
Kiyoshi OHISHI ◽  
Masasuke TAKATA ◽  
Seiji HASHIMOTO ◽  
...  
Keyword(s):  
Motion Control ◽  
High Precision ◽  
Device Driver ◽  
Precision Stage ◽  
Piezoelectric Device ◽  
Fast Motion

Continuous Path Tracking System of High Precision Stage Using Synchronous Piezoelectric Device Driver

2006 ◽  
Vol 11-12 ◽  
pp. 121-124 ◽  
Author(s):  
T.N. Minh ◽  
Kiyoshi Ohishi ◽  
Masasuke Takata ◽  
Seiji Hashimoto ◽  
K. Kosaka ◽  
...  
Keyword(s):  
High Precision ◽  
Tracking System ◽  
Device Driver ◽  
Path Tracking ◽  
Continuous Path ◽  
Precision Stage ◽  
Piezoelectric Device

Adaptive Friction Compensation Design for Submicrometer Positioning of High Precision Stage

2007 ◽  
Author(s):  
Truong Ngoc Minh ◽  
Kiyoshi Ohishi ◽  
Masasuke Takata ◽  
Seiji Hashimoto ◽  
Kouji Kosaka ◽  
...  
Keyword(s):  
High Precision ◽  
Friction Compensation ◽  
Precision Stage ◽  
Compensation Design

Model-based Control Techniques for Large-Scale High-Precision Stage

2020 ◽  
Vol 140 (4) ◽  
pp. 272-280
Author(s):  
Wataru Ohnishi ◽  
Hiroshi Fujimoto ◽  
Koichi Sakata
Keyword(s):  
High Precision ◽  
Large Scale ◽  
Model Based Control ◽  
Precision Stage ◽  
Control Techniques ◽  
Model Based

scholarly journals Sightline Jitter Minimization and Shaping Using Nonlinear Friction Compensation

2007 ◽  
Vol 1 (3) ◽  
pp. 259-283 ◽  
Author(s):  
David Anderson ◽  
Matt MacDonald ◽  
Paul Ingleby ◽  
Nick Brignall
Keyword(s):  
Friction Compensation ◽  
Nonlinear Friction
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