Accurate friction compensation for precision stage using synchronous piezoelectric device driver
2007 ◽
Vol 127
(1)
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pp. 44-51
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2005 ◽
Vol 2005
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pp. _615-1_-_615-6_
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2006 ◽
Vol 11-12
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pp. 121-124
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2014 ◽
Vol 19
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pp. 788-797
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2021 ◽
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pp. 012014
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2020 ◽
Vol 140
(4)
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pp. 272-280
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