Model-based Control Techniques for Large-Scale High-Precision Stage
2020 ◽
Vol 140
(4)
◽
pp. 272-280
Keyword(s):
2018 ◽
Vol 8
(1)
◽
pp. 112-118
◽
Keyword(s):
Keyword(s):
2010 ◽
Vol 43
(18)
◽
pp. 188-193
◽