Micro heaters play a major role in gas sensing applications owing to their accuracy, selectivity and low power consumption. The proposed micro heater employs a window type polysilicon micro-hotplate structure, which is a square cell of side 500 μm, designed using COMSOL Multiphysics.
It is highly imperative that an evenly distributed temperature is necessary over the broad area of the heater in order to improve its gas sensitivity and selectivity. In this paper, we have explained the design and analysis of a novel window-type micro heater made of polysilicon. The main
aim of the work is to achieve temperature uniformity and low power consumption. By optimizing the geometry of the micro heater, we can obtain both temperature uniformity and low power consumption. This geometrical optimization also improves the sensitivity and response time of the sensor.
To support them, we have carried out simulations using COMSOL Multiphysics. The proposed structure has obtained a uniform temperature of 1134.1 K and an average temperature of 1130.39 K. Such high and uniform temperatures finds applications in gas sensors. This work also analyzes the proper
choice and placement of electrodes across the geometry of the heater.
Ultra Low Power Consumption for Self-Oscillating Nanoelectromechanical Systems Constructed by Contacting Two Nanowires
