An ultra-high sensitivity Fabry-Perot acoustic pressure sensor using a multilayer suspended graphene diaphragm

Author(s):  
Li Cheng ◽  
Liu Qianwen ◽  
Guo Tingting ◽  
Xiao Jun ◽  
Fan Shangchun ◽  
...  
2016 ◽  
Vol 166 ◽  
pp. 50-54 ◽  
Author(s):  
Bin Liu ◽  
Jie Lin ◽  
Huan Liu ◽  
An Jin ◽  
Peng Jin

2017 ◽  
Vol 35 (24) ◽  
pp. 5276-5279 ◽  
Author(s):  
Zhenfeng Gong ◽  
Ke Chen ◽  
Xinlei Zhou ◽  
Yang Yang ◽  
Zhihao Zhao ◽  
...  

1996 ◽  
Vol 21 (8) ◽  
pp. 615 ◽  
Author(s):  
T. W. Kao ◽  
H. F. Taylor

2012 ◽  
Vol 37 (2) ◽  
pp. 133 ◽  
Author(s):  
Feng Xu ◽  
Dongxu Ren ◽  
Xiaolong Shi ◽  
Can Li ◽  
Weiwei Lu ◽  
...  

Photonics ◽  
2021 ◽  
Vol 8 (12) ◽  
pp. 581
Author(s):  
Yanan Zhang ◽  
Shubin Zhang ◽  
Haitao Gao ◽  
Danping Xu ◽  
Zhuozhen Gao ◽  
...  

This paper proposes a Fabry–Perot pressure sensor based on AB epoxy adhesive with ultra-high sensitivity under low pressure. Fabry–Perot interference, located between single-mode fiber (SMF) and hollow-core fiber (HCF), is an ultra-thin AB epoxy film formed by capillary action. Then the thick HCF was used to fix the HCF and SMF at both ends with AB epoxy adhesive. Experimental results show that when the thickness of AB epoxy film is 8.74 μm, and the cavity length is 30 μm, the sensor has the highest sensitivity. The sensitivity is 257.79 nm/MPa within the pressure range of 0–70 kPa. It also investigated the influence of the curing time of AB epoxy on the interference spectrum. Experiments showed that the interference spectrum peak is blue-shifted with the increase of curing time. Our study also demonstrated the humidity stability of this pressure sensor. These characteristics mean that our sensor has potential applications in the biomedical field and ocean exploration.


2017 ◽  
Vol 35 (18) ◽  
pp. 4067-4071 ◽  
Author(s):  
Zhe Zhang ◽  
Changrui Liao ◽  
Jian Tang ◽  
Zhiyong Bai ◽  
Kuikui Guo ◽  
...  

2019 ◽  
Vol 90 (9) ◽  
pp. 095002 ◽  
Author(s):  
Chunliu Zhao ◽  
Leyi Hou ◽  
Juan Kang ◽  
Bangning Mao ◽  
Changyu Shen ◽  
...  

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