Monte Carlo simulation of low-energy electron scattering and energy dissipation distribution

2001 6th International Conference on Solid-State and Integrated Circuit Technology. Proceedings (Cat. No.01EX443) ◽

10.1109/icsict.2001.982047 ◽

2005 ◽

Author(s):

Liming Ren ◽

Baoqin Chen ◽

Zhenyu Tan

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Energy Dissipation ◽

Electron Scattering ◽

Energy Electron ◽

Low Energy Electron

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Monte-Carlo simulation of low-energy electron scattering in PMMA – using stopping powers from dielectric formalism

Microelectronic Engineering ◽

10.1016/j.mee.2004.11.009 ◽

2005 ◽

Vol 77 (3-4) ◽

pp. 285-291 ◽

Author(s):

Zhenyu Tan ◽

YueYuan Xia ◽

Xiangdong Liu ◽

Minwen Zhao

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Electron Scattering ◽

Energy Electron ◽

Low Energy Electron

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Monte-Carlo Simulation of Low Energy Electron Scattering in Solids

phys stat sol (a) ◽

10.1002/(sici)1521-396x(199904)172:2<433::aid-pssa433>3.0.co;2-x ◽

1999 ◽

Vol 172 (2) ◽

pp. 433-450 ◽

Author(s):

J.-Ch. Kuhr ◽

H.-J. Fitting

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Electron Scattering ◽

Energy Electron ◽

Low Energy Electron

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Quantum versus classical Monte Carlo simulation of low-energy electron transport in condensed amorphous media

Physica Medica ◽

10.1016/j.ejmp.2018.06.638 ◽

2018 ◽

Vol 54 ◽

pp. 179-188 ◽

Author(s):

Rowan M Thomson ◽

Iwan Kawrakow

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Electron Transport ◽

Energy Electron ◽

Low Energy Electron ◽

Amorphous Media

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Monte Carlo calculation method on low energy electron scattering in polybasic medium

Chinese Science Bulletin ◽

10.1007/bf02883938 ◽

1998 ◽

Vol 43 (2) ◽

pp. 171-174 ◽

Author(s):

Zhenyu Tan ◽

Yancai He

Keyword(s):

Monte Carlo ◽

Electron Scattering ◽

Calculation Method ◽

Monte Carlo Calculation ◽

Energy Electron ◽

Low Energy Electron

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Quasi first-principles Monte Carlo modeling of energy dissipation by low-energy electron beams in multi-walled carbon nanotube materials

Applied Physics Letters ◽

10.1063/1.3688307 ◽

2012 ◽

Vol 100 (9) ◽

pp. 093113 ◽

Author(s):

Dimitris Emfietzoglou ◽

Ioanna Kyriakou ◽

Rafael Garcia-Molina ◽

Isabel Abril ◽

Kostas Kostarelos

Keyword(s):

Monte Carlo ◽

Carbon Nanotube ◽

Energy Dissipation ◽

First Principles ◽

Electron Beams ◽

Energy Electron ◽

Monte Carlo Modeling ◽

Multi Walled Carbon Nanotube ◽

Low Energy Electron

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An elastic cross section model for use with Monte Carlo simulations of low energy electron scattering from high atomic number targets

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.585848 ◽

1991 ◽

Vol 9 (6) ◽

pp. 3578 ◽

Author(s):

R. Browning

Keyword(s):

Monte Carlo ◽

Monte Carlo Simulations ◽

Cross Section ◽

Atomic Number ◽

Electron Scattering ◽

Elastic Cross Section ◽

Energy Electron ◽

Section Model ◽

Low Energy Electron

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Monte Carlo simulation and dose distribution of low energy electron irradiation of an apple

Journal of Food Engineering ◽

10.1016/s0260-8774(03)00007-4 ◽

2003 ◽

Vol 60 (1) ◽

pp. 31-39 ◽

Author(s):

G Brescia ◽

R Moreira ◽

L Braby ◽

E Castell-Perez

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Electron Irradiation ◽

Dose Distribution ◽

Energy Electron ◽

Low Energy Electron

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Theoretical study of low-energy electron penetration in resist-substrate target by Monte Carlo simulation

2008 9th International Conference on Solid-State and Integrated-Circuit Technology ◽

10.1109/icsict.2008.4734789 ◽

2008 ◽

Author(s):

Liming Ren ◽

Baoqin Chen ◽

Ru Huang ◽

Xing Zhang

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Theoretical Study ◽

Energy Electron ◽

Low Energy Electron

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Abstract ID: 88 Quantum versus classical Monte Carlo simulation of low energy electron transport in condensed media

Physica Medica ◽

10.1016/j.ejmp.2017.09.046 ◽

2017 ◽

Vol 42 ◽

pp. 18-19

Author(s):

Rowan M. Thomson ◽

Iwan Kawrakow

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Electron Transport ◽

Energy Electron ◽

Condensed Media ◽

Low Energy Electron

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Optimization of Low-Energy Electron Beam Proximity Lithography Stencil Mask Structure Factors by Monte Carlo Simulation

Japanese Journal of Applied Physics ◽

10.1143/jjap.43.1196 ◽

2004 ◽

Vol 43 (3) ◽

pp. 1196-1198

Author(s):

Chiho Kim ◽

In-Yong Kang ◽

Yong-Chae Chung

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Electron Beam ◽

Energy Electron ◽

Stencil Mask ◽

Structure Factors ◽

Low Energy Electron

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