Young's modulus characterization for the fragile low-a film by the improved surface acoustic waves technique

2005 ◽  
Author(s):  
Xia Xiao ◽  
N. Hata ◽  
Suying Yao ◽  
T. Kikkawa
Keyword(s):  
Young’S Modulus ◽  
Acoustic Waves ◽  
Young's Modulus ◽  
Surface Acoustic Waves

scholarly journals LASER-INDUCED SURFACE ACOUSTIC WAVES FOR THIN FILM CHARACTERIZATION

2020 ◽  
Vol 27 ◽  
pp. 57-61
Author(s):  
Radim Kudělka ◽  
Lukáš Václavek ◽  
Jan Tomáštík ◽  
Sabina Malecová ◽  
Radim Čtvrtlík
Keyword(s):  
Thin Films ◽  
Film Thickness ◽  
Young’S Modulus ◽  
Acoustic Waves ◽  
Young's Modulus ◽  
Surface Acoustic Waves ◽  
Laser Pulses ◽  
Data Application ◽  
Thin Film Characterization ◽  
Short Laser Pulses

Knowledge of mechanical properties of thin films is essential for most of their applications. However, their determination can be problematic for very thin films. LAW (Laser-induced acoustic waves) is a combined acousto-optic method capable of measuring films with thickness from few nanometers. It utilizes ultrasound surface waves which are excited via short laser pulses and detected by a PVDF foil. Properties such as Young’s modulus, Poisson’s ratio and density of both the film and the substrate as well as film thickness can be explored.Results from the LAW method are successfully compared with nanoindentation for Young’s modulus evaluation and with optical method for film thickness evaluation and also with literature data. Application of LAW for anisotropy mapping of materials with cubic crystallographic lattice is also demonstrated.

Young’s Modulus Detection for Ultra-Thin Film by LSAWs Technique with Wavelet and FIR Filter De-Noising

2011 ◽  
Vol 301-303 ◽  
pp. 623-628 ◽  
Author(s):  
Xing Meng Shan ◽  
Xia Xiao ◽  
Yuan Sun
Keyword(s):  
Young’S Modulus ◽  
Acoustic Waves ◽  
Young's Modulus ◽  
Surface Acoustic Waves ◽  
Low Frequency ◽  
Experimental System ◽  
Fir Filter ◽  
Least Square ◽  
Frequency Noise ◽  
Young’S Moduli

Laser-generated surface acoustic waves (LSAWs) technique is a feasible method to determine the Young’s modulus of thin films. The raw surface acoustic wave (SAW) signals detected from the experimental system are often contaminated by external noises. A novel de-noising method is proposed in this paper with wavelet and FIR filter. The wavelet threshold de-noising is essential to reduce the high frequency noise components in the raw SAW signals, while FIR filter can remove the useless low frequency noises. The useful bandwidth of the detected signal ranges from 50 to 190 MHz. Young’s modulus of the detected samples can be obtained by matching the experimental dispersive curves with the theoretical calculated ones via an improved least square fitting method. The Young’s moduli of four low dielectric constant (low-k) samples detected in the measurement are 7.1, 6.8, 1.1 and 1.0 GPa, respectively.

Young’s modulus and density of nanocrystalline cubic boron nitride films determined by dispersion of surface acoustic waves

2002 ◽  
Vol 74 (1) ◽  
pp. 41-45 ◽  
Author(s):  
G. Lehmann ◽  
P. Hess ◽  
S. Weissmantel ◽  
G. Reisse ◽  
P. Scheible ◽  
...  
Keyword(s):  
Boron Nitride ◽  
Young’S Modulus ◽  
Acoustic Waves ◽  
Young's Modulus ◽  
Cubic Boron Nitride ◽  
Surface Acoustic Waves ◽  
Boron Nitride Films

scholarly journals Young's modulus of (Ti,Si)N films by surface acoustic waves and indentation techniques

2002 ◽  
Vol 408 (1-2) ◽  
pp. 160-168 ◽  
Author(s):  
F Vaz ◽  
S Carvalho ◽  
L Rebouta ◽  
M.Z Silva ◽  
A Paúl ◽  
...  
Keyword(s):  
Young’S Modulus ◽  
Acoustic Waves ◽  
Young's Modulus ◽  
Surface Acoustic Waves

Thin-Film Aerogel Porosity and Stiffness Characterized by Surface Acoustic Wave Spectroscopy

2001 ◽  
Vol 714 ◽  
Author(s):  
C.M. Flannery ◽  
C. Murray ◽  
M.R. Baklanov ◽  
I. Streiter ◽  
S.E. Schulz
Keyword(s):  
Young’S Modulus ◽  
Acoustic Waves ◽  
Rutherford Backscattering Spectrometry ◽  
Young's Modulus ◽  
Surface Acoustic Waves ◽  
Critical Parameters ◽  
Porous Films ◽  
Film Stiffness ◽  
Aerogel Films

ABSTRACTDensity/porosity and stiffness are the most critical parameters determining properties of porous films, however they are difficult to measure. Here we report characterization of density/porosity and Young's modulus values of a range of nanoporous silica aerogel films via dispersion of laser-generated wideband surface acoustic waves. Results are compared to dielectric constant, Rutherford Backscattering Spectrometry (RBS), Ellipsometric Porosimetry (EP) and Nanoindentation (NI). RBS density correlates well to SAW. EP and NI also show a correlation, however the absolute values do not match. Low Young's modulus values show that the film stiffness is drastically reduced with increasing porosity. The technique is rapid, nondestructive and relatively inexpensive, and yields absolute values of nanoporous aerogel elastic properties which are useful for process control and are difficult to access with other techniques.

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