Novel aspects of the atomic transport of B implanted in silicon at energies below 1 keV

Author(s):  
V. Privitera ◽  
E. Napolitani ◽  
F. Priolo ◽  
S. Moffatt ◽  
E. Rimini
Keyword(s):  
Author(s):  
M. A. Mohaiminul Islam ◽  
R. C. Gosh ◽  
Fysol Ibna Abbas ◽  
G. M. Bhuiyan

2015 ◽  
Vol 107 (8) ◽  
pp. 082112 ◽  
Author(s):  
M. Radek ◽  
H. Bracht ◽  
B. C. Johnson ◽  
J. C. McCallum ◽  
M. Posselt ◽  
...  

1991 ◽  
Vol 51 (3-4) ◽  
pp. 133-138 ◽  
Author(s):  
A. Serrari ◽  
J.L. Chartier ◽  
R. Le Bihan ◽  
S. Rigo ◽  
J.C. Dupuy

1986 ◽  
Vol 74 ◽  
Author(s):  
K. Tao ◽  
C. A. Hewett ◽  
S. S. Lau ◽  
Ch. Buchal ◽  
D. B. Poker

AbstractWe present evidence in this study that the moving species under ion mixing conditions are affected by the implantation damage distribution in the sample. This observation holds for metal-semiconductor, metal-metal and semiconductorsemiconductor systems. The direction of thermal annealing and atomic transport appears to play a role in ion-mixing as well. When these two factors are in the same direction, only one dominant moving species is observed. When these two factors are in opposite directions, both constituents can contribute to the atomic transport in ion mixing.


1997 ◽  
Vol 56 (3) ◽  
pp. 2109-2122 ◽  
Author(s):  
W. Greenwood ◽  
P. Pax ◽  
P. Meystre

2011 ◽  
Vol 84 (4) ◽  
Author(s):  
Xi Chen ◽  
E. Torrontegui ◽  
Dionisis Stefanatos ◽  
Jr-Shin Li ◽  
J. G. Muga

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