Impact of TaN/Ta copper barrier on full PEALD TiN/Ta2O5/TiN 3D damascene MIM capacitor performance
Keyword(s):
2020 ◽
Vol 59
(3)
◽
pp. 1702-1714
◽
2018 ◽
Vol 165
(2)
◽
pp. A305-A313
◽
2019 ◽
Vol 21
(45)
◽
pp. 25196-25205
◽
2013 ◽
Vol 24
(4)
◽
pp. 737-742
◽