Study Of Bottom Antireflective Coating Process Using A High-Transparency Resist For ArF Excimer Laser Lithography
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1998 ◽
Vol 37
(Part 1, No. 12B)
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pp. 6729-6733
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2000 ◽
Vol 53
(1-4)
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pp. 141-144
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1998 ◽
Vol 11
(3)
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pp. 489-492
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1993 ◽
Vol 6
(4)
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pp. 473-490
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