Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135)
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Fabrication Of Periodic Si Nanostructure By Controlled Anodization

Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135) ◽

10.1109/imnc.1998.730022 ◽

1998 ◽

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Nanofabrication Using Scanning Near-Field Optical Microscopy

Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135) ◽

10.1109/imnc.1998.730081 ◽

1998 ◽

Keyword(s):

Optical Microscopy ◽

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Sub-Quarter-Micron PT Etching Technology Using Round Head EB Resist

Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135) ◽

10.1109/imnc.1998.730112 ◽

1998 ◽

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Process Technology For Next Generation Photomask

Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135) ◽

10.1109/imnc.1998.729953 ◽

1998 ◽

Keyword(s):

Next Generation ◽

Process Technology

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Coupling Characteristics Of Semiconductor Quantum Dots In Coulomb Blockade Regime

Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135) ◽

10.1109/imnc.1998.730019 ◽

1998 ◽

Keyword(s):

Quantum Dots ◽

Coulomb Blockade ◽

Semiconductor Quantum Dots ◽

Coupling Characteristics ◽

Coulomb Blockade Regime

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Positive-Tone E-Beam Lithography With Surface Silylation Of Negative-Tone Commercial Photoresists Sal 601 And AZPN 114

Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135) ◽

10.1109/imnc.1998.730074 ◽

1998 ◽

Keyword(s):

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Novel Fabrication Process Of Freestanding Metallic Microstructures Using Double Electroplating

Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135) ◽

10.1109/imnc.1998.729982 ◽

1998 ◽

Keyword(s):

Fabrication Process ◽

Metallic Microstructures

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Thermal Distortion Of An X-Ray Mask For Synchrotron Radiation Lithography

Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135) ◽

10.1109/imnc.1998.729999 ◽

1998 ◽

Keyword(s):

Synchrotron Radiation ◽

Thermal Distortion ◽

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A High Performance Polycrystalline Silicon Thin Film Transistor Using A Metal Induced Crystallization With A Ni Solution

Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135) ◽

10.1109/imnc.1998.730107 ◽

1998 ◽

Keyword(s):

Thin Film ◽

Polycrystalline Silicon ◽

High Performance ◽

Thin Film Transistor ◽

Silicon Thin Film ◽

Metal Induced Crystallization ◽

Induced Crystallization

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Quantized Conductance Of A Gate-All-Around Silicon Quantum Wire Transistor

Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135) ◽

10.1109/imnc.1998.730018 ◽

1998 ◽

Keyword(s):

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