Optimization of Al-doped zinc oxide grown on sapphire using dual-plasma-enhanced metal organic chemical vapor deposition for InGaN/GaN light-emitting diodes

2013 ◽  
Author(s):  
Po-Hsun Lei ◽  
Chia-Ming Hsu ◽  
Chia-Te Lin ◽  
Yu-Siang Fan ◽  
Sheng-Jhan Ye
Keyword(s):  
Zinc Oxide ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Light Emitting Diodes ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Light Emitting ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition

Metal organic chemical vapor deposition of crack-free GaN-based light emitting diodes on Si (111) using a thin Al2O3 interlayer

2009 ◽  
Vol 94 (22) ◽  
pp. 222105 ◽  
Author(s):  
William E. Fenwick ◽  
Andrew Melton ◽  
Tianming Xu ◽  
Nola Li ◽  
Christopher Summers ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Light Emitting Diodes ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Light Emitting ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition

Volatile, Monomeric, and Fluorine-Free Precursors for the Metal Organic Chemical Vapor Deposition of Zinc Oxide

2010 ◽  
Vol 2010 (9) ◽  
pp. 1366-1372 ◽  
Author(s):  
Daniela Bekermann ◽  
Detlef Rogalla ◽  
Hans-Werner Becker ◽  
Manuela Winter ◽  
Roland A. Fischer ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition
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