Volatile, Monomeric, and Fluorine-Free Precursors for the Metal Organic Chemical Vapor Deposition of Zinc Oxide

European Journal of Inorganic Chemistry ◽

10.1002/ejic.200901037 ◽

2010 ◽

Vol 2010 (9) ◽

pp. 1366-1372 ◽

Author(s):

Daniela Bekermann ◽

Detlef Rogalla ◽

Hans-Werner Becker ◽

Manuela Winter ◽

Roland A. Fischer ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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Characterizations of arsenic-doped zinc oxide films produced by atmospheric metal-organic chemical vapor deposition

Applied Surface Science ◽

10.1016/j.apsusc.2013.03.005 ◽

2013 ◽

Vol 277 ◽

pp. 1-6 ◽

Author(s):

Li-Wei Weng ◽

Wu-Yih Uen ◽

Shan-Ming Lan ◽

Sen-Mao Liao ◽

Tsun-Neng Yang ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Oxide Films ◽

Chemical Vapor ◽

Organic Chemical ◽

Zinc Oxide Films ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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Charge transport, optical transparency, microstructure, and processing relationships in transparent conductive indium–zinc oxide films grown by low-pressure metal-organic chemical vapor deposition

Applied Physics Letters ◽

10.1063/1.121823 ◽

1998 ◽

Vol 73 (3) ◽

pp. 327-329 ◽

Author(s):

Anchuan Wang ◽

Jiyan Dai ◽

Jizhi Cheng ◽

Michael P. Chudzik ◽

Tobin J. Marks ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Charge Transport ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Zinc Oxide Films ◽

Indium Zinc Oxide ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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Boron-doped zinc oxide thin films grown by metal organic chemical vapor deposition for bifacial a-Si:H/c-Si heterojunction solar cells

Thin Solid Films ◽

10.1016/j.tsf.2015.11.023 ◽

2016 ◽

Vol 605 ◽

pp. 257-262 ◽

Author(s):

Xiangbin Zeng ◽

Xixing Wen ◽

Xiaohu Sun ◽

Wugang Liao ◽

Yangyang Wen

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Heterojunction Solar Cells ◽

Boron Doped ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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Temperature-dependent growth of zinc oxide thin films grown by metal organic chemical vapor deposition

Journal of Crystal Growth ◽

10.1016/j.jcrysgro.2006.08.028 ◽

2006 ◽

Vol 296 (1) ◽

pp. 43-50 ◽

Author(s):

X.L. Chen ◽

X.H. Geng ◽

J.M. Xue ◽

D.K. Zhang ◽

G.F. Hou ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Temperature Dependent ◽

Metal Organic ◽

Dependent Growth ◽

Organic Chemical Vapor Deposition

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Characterization of Zinc Oxide Films Grown by a Newly Developed Plasma Enhanced Metal Organic Chemical Vapor Deposition Employing Microwave Excited High Density Plasma

Japanese Journal of Applied Physics ◽

10.1143/jjap.47.2994 ◽

2008 ◽

Vol 47 (4) ◽

pp. 2994-2998 ◽

Author(s):

Hirokazu Asahara ◽

Atsutoshi Inokuchi ◽

Kohei Watanuki ◽

Masaki Hirayama ◽

Akinobu Teramoto ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Zinc Oxide Films ◽

Metal Organic ◽

Organic Chemical Vapor Deposition ◽

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Optical and Structural Properties of Nickel Doped Zinc Oxide Grown by Metal Organic Chemical Vapor Deposition (MOCVD) at Different Reaction Chamber Conditions

ES Materials & Manufacturing ◽

10.30919/esmm5f715 ◽

2020 ◽

Author(s):

Zahra Manzoor ◽

◽

Vishal Saravade ◽

Alexis Margaret Corda ◽

Ian Ferguson ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Structural Properties ◽

Vapor Deposition ◽

Chemical Vapor ◽

Reaction Chamber ◽

Organic Chemical ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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Morphology and optical properties of zinc oxide thin films grown on Si (100) by metal-organic chemical vapor deposition

Journal of Materials Science Materials in Electronics ◽

10.1007/s10854-008-9664-7 ◽

2008 ◽

Vol 20 (S1) ◽

pp. 441-445 ◽

Author(s):

S. M. Lan ◽

W. Y. Uen ◽

C. E. Chan ◽

K. J. Chang ◽

S. C. Hung ◽

...

Keyword(s):

Optical Properties ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Oxide Thin Films ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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Boron-doped zinc oxide thin films for large-area solar cells grown by metal organic chemical vapor deposition

Thin Solid Films ◽

10.1016/j.tsf.2006.09.039 ◽

2007 ◽

Vol 515 (7-8) ◽

pp. 3753-3759 ◽

Author(s):

X.L. Chen ◽

B.H. Xu ◽

J.M. Xue ◽

Y. Zhao ◽

C.C. Wei ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Boron Doped ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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Semiconducting Zinc Oxide Films Prepared by Metal Organic Chemical Vapor Deposition from Diethyl Zinc

Journal of The Electrochemical Society ◽

10.1149/1.2127329 ◽

1981 ◽

Vol 128 (12) ◽

pp. 2684-2686 ◽

Author(s):

A. P. Roth ◽

D. F. Williams

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Oxide Films ◽

Chemical Vapor ◽

Organic Chemical ◽

Diethyl Zinc ◽

Zinc Oxide Films ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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Optimization of Al-doped zinc oxide grown on sapphire using dual-plasma-enhanced metal organic chemical vapor deposition for InGaN/GaN light-emitting diodes

2013 IEEE 5th International Nanoelectronics Conference (INEC) ◽

10.1109/inec.2013.6465993 ◽

2013 ◽

Author(s):

Po-Hsun Lei ◽

Chia-Ming Hsu ◽

Chia-Te Lin ◽

Yu-Siang Fan ◽

Sheng-Jhan Ye

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Light Emitting Diodes ◽

Chemical Vapor ◽

Organic Chemical ◽

Light Emitting ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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