Local stress determination in Shallow Trench Insulator structures with one-side and two-sides Pad-SiN layer by polarized micro-Raman spectroscopy extraction and mechanical modelization

2011 ◽  
Author(s):  
M. H. Liao ◽  
L. C. Chang
Keyword(s):  
Raman Spectroscopy ◽  
Local Stress ◽  
Stress Determination ◽  
Micro Raman Spectroscopy ◽  
Two Sides

Raman Spectroscopy: A Unique Tool for the Study of Thin Films

2000 ◽  
Vol 615 ◽  
Author(s):  
Ingrid De Wolf
Keyword(s):  
Thin Films ◽  
Raman Spectroscopy ◽  
Local Stress ◽  
Micro Raman Spectroscopy

ABSTRACTIn this paper, the different applications of Raman spectroscopy for the study of thin films is briefly discussed, using examples from microelectronics. Special attention is given to the application of micro-Raman spectroscopy for the measurement of local stress in and near films.

T0302-2-2 Local stress analysis of single-crystalline resonator using micro Raman spectroscopy

2010 ◽  
Vol 2010.8 (0) ◽  
pp. 255-256
Author(s):  
Akira TANIYAMA ◽  
Yoshikazu HIRAI ◽  
Koji SUGANO ◽  
Osamu TABATA ◽  
Tsuyoshi IKEHARA ◽  
...  
Keyword(s):  
Raman Spectroscopy ◽  
Stress Analysis ◽  
Local Stress ◽  
Single Crystalline ◽  
Micro Raman Spectroscopy

scholarly journals Local stress measurements in laterally oxidized GaAs/AlxGa1−xAs heterostructures by micro-Raman spectroscopy

1997 ◽  
Vol 71 (17) ◽  
pp. 2520-2522 ◽  
Author(s):  
J. P. Landesman ◽  
A. Fiore ◽  
J. Nagle ◽  
V. Berger ◽  
E. Rosencher ◽  
...  
Keyword(s):  
Raman Spectroscopy ◽  
Local Stress ◽  
Stress Measurements ◽  
Micro Raman Spectroscopy
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