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Performance Boosting of Peripheral Transistor for High Density 4Gb DRAM Technologies by SiGe Selective Epitaxial Growth Technique
2006 International SiGe Technology and Device Meeting
◽
10.1109/istdm.2006.1662551
◽
2006
◽
Author(s):
I.S. Jung
◽
S.-G. Lee
◽
D.-H. Lee
◽
E.-C. Lee
◽
W. Kim
◽
...
Keyword(s):
Epitaxial Growth
◽
High Density
◽
Growth Technique
◽
Selective Epitaxial Growth
Download Full-text
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Cited By
References
Performance Boosting of Peripheral Transistor for High Density 4Gb DRAM Technologies by SiGe Selective Epitaxial Growth Technique
2006 International SiGe Technology and Device Meeting
◽
10.1109/istdm.2006.246571
◽
2006
◽
Cited By ~ 1
Author(s):
I.S. Jung
◽
S.-G. Lee
◽
D.-H. Lee
◽
E.-C. Lee
◽
W. Kim
◽
...
Keyword(s):
Epitaxial Growth
◽
High Density
◽
Growth Technique
◽
Selective Epitaxial Growth
Download Full-text
Performance Boosting of Peripheral Transistor for High Density 4Gb DRAM Technologies by SiGe Selective Epitaxial Growth Technique
2006 International SiGe Technology and Device Meeting
◽
10.1109/istdm.2006.1715940
◽
2006
◽
Author(s):
I.S. Jung
◽
S.-G. Lee
◽
D.-H. Lee
◽
E.-C. Lee
◽
W. Kim
◽
...
Keyword(s):
Epitaxial Growth
◽
High Density
◽
Growth Technique
◽
Selective Epitaxial Growth
Download Full-text
High Density Planes Deposition Kinetics and Facets Propagation in Silicon Selective Epitaxial Growth
2006 International SiGe Technology and Device Meeting
◽
10.1109/istdm.2006.1662624
◽
2006
◽
Author(s):
N. Loubet
◽
A. Talbot
◽
D. Dutartre
◽
D. Dutartre
Keyword(s):
Epitaxial Growth
◽
High Density
◽
Deposition Kinetics
◽
Selective Epitaxial Growth
Download Full-text
SOI/Bulk Hybrid Wafer Process Using SEG (Selective Epitaxial Growth) Technique for High-End SoC Applications
10.7567/ssdm.2002.p3-12
◽
2002
◽
Author(s):
Hajime Nagano
◽
Tsutomu Sato
◽
Kiyotaka Miyano
◽
Takashi Yamada
◽
Ichiro Mizushima
Keyword(s):
Epitaxial Growth
◽
Growth Technique
◽
Selective Epitaxial Growth
Download Full-text
High-density plane deposition kinetics and facet propagation in silicon-selective epitaxial growth
Semiconductor Science and Technology
◽
10.1088/0268-1242/22/1/s35
◽
2006
◽
Vol 22
(1)
◽
pp. S149-S152
◽
Cited By ~ 5
Author(s):
Nicolas Loubet
◽
Alexandre Talbot
◽
Didier Dutartre
Keyword(s):
Epitaxial Growth
◽
High Density
◽
Deposition Kinetics
◽
Selective Epitaxial Growth
Download Full-text
Source/drain engineering for sub-100 nm CMOS using selective epitaxial growth technique
International Electron Devices Meeting 2000. Technical Digest. IEDM (Cat. No.00CH37138)
◽
10.1109/iedm.2000.904302
◽
2002
◽
Cited By ~ 14
Author(s):
A. Hokazono
◽
K. Ohuchi
◽
K. Miyano
◽
I. Mizushima
◽
Y. Tsunashima
◽
...
Keyword(s):
Epitaxial Growth
◽
Growth Technique
◽
Selective Epitaxial Growth
Download Full-text
Selective epitaxial growth for plugs of high-density devices
Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena
◽
10.1116/1.1568353
◽
2003
◽
Vol 21
(3)
◽
pp. 975
◽
Cited By ~ 1
Author(s):
Woo-Seok Cheong
◽
Seok-Kiu Lee
◽
Jae-Sung Roh
Keyword(s):
Epitaxial Growth
◽
High Density
◽
Selective Epitaxial Growth
Download Full-text
Optical anisotropy in wire‐geometry SiGe layers grown by gas‐source selective epitaxial growth technique
Applied Physics Letters
◽
10.1063/1.110827
◽
1994
◽
Vol 64
(9)
◽
pp. 1126-1128
◽
Cited By ~ 62
Author(s):
N. Usami
◽
T. Mine
◽
S. Fukatsu
◽
Y. Shiraki
Keyword(s):
Epitaxial Growth
◽
Optical Anisotropy
◽
Growth Technique
◽
Selective Epitaxial Growth
◽
Gas Source
Download Full-text
High Density Planes Deposition Kinetics and Facets Propagation in Silicon Selective Epitaxial Growth
2006 International SiGe Technology and Device Meeting
◽
10.1109/istdm.2006.1716013
◽
2006
◽
Author(s):
N. Loubet
◽
A. Talbot
◽
D. Dutartre
◽
D. Dutartre
Keyword(s):
Epitaxial Growth
◽
High Density
◽
Deposition Kinetics
◽
Selective Epitaxial Growth
Download Full-text
High Density Planes Deposition Kinetics and Facets Propagation in Silicon Selective Epitaxial Growth
2006 International SiGe Technology and Device Meeting
◽
10.1109/istdm.2006.246519
◽
2006
◽
Cited By ~ 2
Author(s):
N. Loubet
◽
A. Talbot
◽
D. Dutartre
Keyword(s):
Epitaxial Growth
◽
High Density
◽
Deposition Kinetics
◽
Selective Epitaxial Growth
Download Full-text
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