Selective epitaxial growth for plugs of high-density devices

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.1568353 ◽

2003 ◽

Vol 21 (3) ◽

pp. 975 ◽

Author(s):

Woo-Seok Cheong ◽

Seok-Kiu Lee ◽

Jae-Sung Roh

Keyword(s):

Epitaxial Growth ◽

High Density ◽

Selective Epitaxial Growth

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High Density Planes Deposition Kinetics and Facets Propagation in Silicon Selective Epitaxial Growth

2006 International SiGe Technology and Device Meeting ◽

10.1109/istdm.2006.1662624 ◽

2006 ◽

Author(s):

N. Loubet ◽

A. Talbot ◽

D. Dutartre ◽

D. Dutartre

Keyword(s):

Epitaxial Growth ◽

High Density ◽

Deposition Kinetics ◽

Selective Epitaxial Growth

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Performance Boosting of Peripheral Transistor for High Density 4Gb DRAM Technologies by SiGe Selective Epitaxial Growth Technique

2006 International SiGe Technology and Device Meeting ◽

10.1109/istdm.2006.1662551 ◽

2006 ◽

Author(s):

I.S. Jung ◽

S.-G. Lee ◽

D.-H. Lee ◽

E.-C. Lee ◽

W. Kim ◽

...

Keyword(s):

Epitaxial Growth ◽

High Density ◽

Growth Technique ◽

Selective Epitaxial Growth

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High-density plane deposition kinetics and facet propagation in silicon-selective epitaxial growth

Semiconductor Science and Technology ◽

10.1088/0268-1242/22/1/s35 ◽

2006 ◽

Vol 22 (1) ◽

pp. S149-S152 ◽

Author(s):

Nicolas Loubet ◽

Alexandre Talbot ◽

Didier Dutartre

Keyword(s):

Epitaxial Growth ◽

High Density ◽

Deposition Kinetics ◽

Selective Epitaxial Growth

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Performance Boosting of Peripheral Transistor for High Density 4Gb DRAM Technologies by SiGe Selective Epitaxial Growth Technique

2006 International SiGe Technology and Device Meeting ◽

10.1109/istdm.2006.246571 ◽

2006 ◽

Author(s):

I.S. Jung ◽

S.-G. Lee ◽

D.-H. Lee ◽

E.-C. Lee ◽

W. Kim ◽

...

Keyword(s):

Epitaxial Growth ◽

High Density ◽

Growth Technique ◽

Selective Epitaxial Growth

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Performance Boosting of Peripheral Transistor for High Density 4Gb DRAM Technologies by SiGe Selective Epitaxial Growth Technique

2006 International SiGe Technology and Device Meeting ◽

10.1109/istdm.2006.1715940 ◽

2006 ◽

Author(s):

I.S. Jung ◽

S.-G. Lee ◽

D.-H. Lee ◽

E.-C. Lee ◽

W. Kim ◽

...

Keyword(s):

Epitaxial Growth ◽

High Density ◽

Growth Technique ◽

Selective Epitaxial Growth

Download Full-text

High Density Planes Deposition Kinetics and Facets Propagation in Silicon Selective Epitaxial Growth

2006 International SiGe Technology and Device Meeting ◽

10.1109/istdm.2006.1716013 ◽

2006 ◽

Author(s):

N. Loubet ◽

A. Talbot ◽

D. Dutartre ◽

D. Dutartre

Keyword(s):

Epitaxial Growth ◽

High Density ◽

Deposition Kinetics ◽

Selective Epitaxial Growth

Download Full-text

High Density Planes Deposition Kinetics and Facets Propagation in Silicon Selective Epitaxial Growth

2006 International SiGe Technology and Device Meeting ◽

10.1109/istdm.2006.246519 ◽

2006 ◽

Author(s):

N. Loubet ◽

A. Talbot ◽

D. Dutartre

Keyword(s):

Epitaxial Growth ◽

High Density ◽

Deposition Kinetics ◽

Selective Epitaxial Growth

Download Full-text

Selective Epitaxial Growth of Rh Nanorods on 2H/fcc Heterophase Au Nanosheets to Form 1D/2D Rh–Au Heterostructures for Highly Efficient Hydrogen Evolution

Journal of the American Chemical Society ◽

10.1021/jacs.1c00612 ◽

2021 ◽

Vol 143 (11) ◽

pp. 4387-4396 ◽

Author(s):

Jiawei Liu ◽

Wenxin Niu ◽

Guigao Liu ◽

Bo Chen ◽

Jingtao Huang ◽

...

Keyword(s):

Epitaxial Growth ◽

Hydrogen Evolution ◽

Selective Epitaxial Growth ◽

Highly Efficient

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Thick selective epitaxial growth of silicon at 960°C using silane only

Microelectronic Engineering ◽

10.1016/s0167-9317(05)80004-8 ◽

1992 ◽

Vol 18 (3) ◽

pp. 237-246 ◽

Author(s):

N. Afshar-Hanaii ◽

J.M. Bonar ◽

A.G.R. Evans ◽

G.J. Parker ◽

C.M.K. Starbuck ◽

...

Keyword(s):

Epitaxial Growth ◽

Selective Epitaxial Growth

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180 GHz f/sub T/ and f/sub max/ self-aligned SiGeC HBT using selective epitaxial growth of the base

ESSDERC '03. 33rd Conference on European Solid-State Device Research, 2003. ◽

10.1109/essderc.2003.1256873 ◽

2004 ◽

Author(s):

P. Chevalier ◽

C. Fellous ◽

B. Martinet ◽

F. Leverd ◽

F. Saguin ◽

...

Keyword(s):

Epitaxial Growth ◽

Selective Epitaxial Growth

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