Performance Boosting of Peripheral Transistor for High Density 4Gb DRAM Technologies by SiGe Selective Epitaxial Growth Technique

2006 International SiGe Technology and Device Meeting ◽

10.1109/istdm.2006.1715940 ◽

2006 ◽

Author(s):

I.S. Jung ◽

S.-G. Lee ◽

D.-H. Lee ◽

E.-C. Lee ◽

W. Kim ◽

...

Keyword(s):

Epitaxial Growth ◽

High Density ◽

Growth Technique ◽

Selective Epitaxial Growth

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Performance Boosting of Peripheral Transistor for High Density 4Gb DRAM Technologies by SiGe Selective Epitaxial Growth Technique

2006 International SiGe Technology and Device Meeting ◽

10.1109/istdm.2006.1662551 ◽

2006 ◽

Author(s):

I.S. Jung ◽

S.-G. Lee ◽

D.-H. Lee ◽

E.-C. Lee ◽

W. Kim ◽

...

Keyword(s):

Epitaxial Growth ◽

High Density ◽

Growth Technique ◽

Selective Epitaxial Growth

Download Full-text

Performance Boosting of Peripheral Transistor for High Density 4Gb DRAM Technologies by SiGe Selective Epitaxial Growth Technique

2006 International SiGe Technology and Device Meeting ◽

10.1109/istdm.2006.246571 ◽

2006 ◽

Author(s):

I.S. Jung ◽

S.-G. Lee ◽

D.-H. Lee ◽

E.-C. Lee ◽

W. Kim ◽

...

Keyword(s):

Epitaxial Growth ◽

High Density ◽

Growth Technique ◽

Selective Epitaxial Growth

Download Full-text

High Density Planes Deposition Kinetics and Facets Propagation in Silicon Selective Epitaxial Growth

2006 International SiGe Technology and Device Meeting ◽

10.1109/istdm.2006.1662624 ◽

2006 ◽

Author(s):

N. Loubet ◽

A. Talbot ◽

D. Dutartre ◽

D. Dutartre

Keyword(s):

Epitaxial Growth ◽

High Density ◽

Deposition Kinetics ◽

Selective Epitaxial Growth

Download Full-text

SOI/Bulk Hybrid Wafer Process Using SEG (Selective Epitaxial Growth) Technique for High-End SoC Applications

10.7567/ssdm.2002.p3-12 ◽

2002 ◽

Author(s):

Hajime Nagano ◽

Tsutomu Sato ◽

Kiyotaka Miyano ◽

Takashi Yamada ◽

Ichiro Mizushima

Keyword(s):

Epitaxial Growth ◽

Growth Technique ◽

Selective Epitaxial Growth

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High-density plane deposition kinetics and facet propagation in silicon-selective epitaxial growth

Semiconductor Science and Technology ◽

10.1088/0268-1242/22/1/s35 ◽

2006 ◽

Vol 22 (1) ◽

pp. S149-S152 ◽

Author(s):

Nicolas Loubet ◽

Alexandre Talbot ◽

Didier Dutartre

Keyword(s):

Epitaxial Growth ◽

High Density ◽

Deposition Kinetics ◽

Selective Epitaxial Growth

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Source/drain engineering for sub-100 nm CMOS using selective epitaxial growth technique

International Electron Devices Meeting 2000. Technical Digest. IEDM (Cat. No.00CH37138) ◽

10.1109/iedm.2000.904302 ◽

2002 ◽

Author(s):

A. Hokazono ◽

K. Ohuchi ◽

K. Miyano ◽

I. Mizushima ◽

Y. Tsunashima ◽

...

Keyword(s):

Epitaxial Growth ◽

Growth Technique ◽

Selective Epitaxial Growth

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Selective epitaxial growth for plugs of high-density devices

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.1568353 ◽

2003 ◽

Vol 21 (3) ◽

pp. 975 ◽

Author(s):

Woo-Seok Cheong ◽

Seok-Kiu Lee ◽

Jae-Sung Roh

Keyword(s):

Epitaxial Growth ◽

High Density ◽

Selective Epitaxial Growth

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Optical anisotropy in wire‐geometry SiGe layers grown by gas‐source selective epitaxial growth technique

Applied Physics Letters ◽

10.1063/1.110827 ◽

1994 ◽

Vol 64 (9) ◽

pp. 1126-1128 ◽

Author(s):

N. Usami ◽

T. Mine ◽

S. Fukatsu ◽

Y. Shiraki

Keyword(s):

Epitaxial Growth ◽

Optical Anisotropy ◽

Growth Technique ◽

Selective Epitaxial Growth ◽

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High Density Planes Deposition Kinetics and Facets Propagation in Silicon Selective Epitaxial Growth

2006 International SiGe Technology and Device Meeting ◽

10.1109/istdm.2006.1716013 ◽

2006 ◽

Author(s):

N. Loubet ◽

A. Talbot ◽

D. Dutartre ◽

D. Dutartre

Keyword(s):

Epitaxial Growth ◽

High Density ◽

Deposition Kinetics ◽

Selective Epitaxial Growth

Download Full-text

High Density Planes Deposition Kinetics and Facets Propagation in Silicon Selective Epitaxial Growth

2006 International SiGe Technology and Device Meeting ◽

10.1109/istdm.2006.246519 ◽

2006 ◽

Author(s):

N. Loubet ◽

A. Talbot ◽

D. Dutartre

Keyword(s):

Epitaxial Growth ◽

High Density ◽

Deposition Kinetics ◽

Selective Epitaxial Growth

Download Full-text