Metal-free and gasless space charge compensation of low energy ion beam by using surface-carbonized silicon field emitter array

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

10.1116/1.3271159 ◽

2010 ◽

Vol 28 (2) ◽

pp. C2D5-C2D10 ◽

Author(s):

Mitsuaki Takeuchi ◽

Yasuhito Gotoh ◽

Hiroshi Tsuji ◽

Junzo Ishikawa ◽

Shigeki Sakai

Keyword(s):

Space Charge ◽

Ion Beam ◽

Charge Compensation ◽

Field Emitter ◽

Emitter Array ◽

Field Emitter Array

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Application of silicon field emitter arrays for space-charge compensation of low energy ion beam

2009 22nd International Vacuum Nanoelectronics Conference ◽

10.1109/ivnc.2009.5271847 ◽

2009 ◽

Author(s):

M. Takeuchi ◽

S. Taguchi ◽

Y. Gotoh ◽

H. Suji ◽

J. Ishikawa ◽

...

Keyword(s):

Space Charge ◽

Ion Beam ◽

Charge Compensation ◽

Field Emitter ◽

Field Emitter Arrays

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Formation of low energy electron beam with silicon field emitter arrays for space charge compensation in low-energy ion-implantation system

2009 22nd International Vacuum Nanoelectronics Conference ◽

10.1109/ivnc.2009.5271586 ◽

2009 ◽

Author(s):

Shuhei Taguchi ◽

Mitsuaki Takeuchi ◽

Yasuhito Gotoh ◽

Hiroshi Tsuji ◽

Junzo Ishikawa ◽

...

Keyword(s):

Electron Beam ◽

Ion Implantation ◽

Space Charge ◽

Charge Compensation ◽

Energy Electron ◽

Field Emitter ◽

Field Emitter Arrays ◽

Low Energy Electron

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Space charge compensation of low energy ion beam

Review of Scientific Instruments ◽

10.1063/1.1431412 ◽

2002 ◽

Vol 73 (2) ◽

pp. 995-997 ◽

Author(s):

V. Dudnikov ◽

A. Dudnikov

Keyword(s):

Space Charge ◽

Ion Beam ◽

Charge Compensation ◽

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Neutralization of space charge on high-current low-energy ion beam by low-energy electrons supplied from silicon based field emitter arrays

10.1063/1.4766565 ◽

2012 ◽

Author(s):

Yasuhito Gotoh ◽

Hiroshi Tsuji ◽

Shuhei Taguchi ◽

Keita Ikeda ◽

Takayuki Kitagawa ◽

...

Keyword(s):

Space Charge ◽

Ion Beam ◽

High Current ◽

Field Emitter ◽

Field Emitter Arrays ◽

Low Energy Electrons ◽

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Modification of field emitter array tip shape by focused ion-beam irradiation

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.588967 ◽

1996 ◽

Vol 14 (3) ◽

pp. 1973 ◽

Author(s):

M. Takai

Keyword(s):

Focused Ion Beam ◽

Ion Beam ◽

Beam Irradiation ◽

Ion Beam Irradiation ◽

Field Emitter ◽

Emitter Array ◽

Field Emitter Array

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Development of low energy ion beam system for space charge compensation experiments

Review of Scientific Instruments ◽

10.1063/1.2801549 ◽

2008 ◽

Vol 79 (2) ◽

pp. 02B712 ◽

Author(s):

Mitsuaki Takeuchi ◽

Yasuhito Gotoh ◽

Hiroshi Tsuji ◽

Junzo Ishikawa ◽

Shigeki Sakai

Keyword(s):

Space Charge ◽

Ion Beam ◽

Charge Compensation ◽

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Emission characteristics of ZrN thin film field emitter array fabricated with ion beam assisted deposition technique

10th International Conference on Vacuum Microelectronics ◽

10.1109/ivmc.1997.627660 ◽

1997 ◽

Keyword(s):

Thin Film ◽

Ion Beam ◽

Emission Characteristics ◽

Deposition Technique ◽

Field Emitter ◽

Ion Beam Assisted Deposition ◽

Emitter Array ◽

Field Emitter Array

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Modification of field emitter array (FEA) tip shape by focused ion beam irradiation

IVMC '95. Eighth International Vacuum Microelectronics Conference. Technical Digest (Cat. No.TH8012) ◽

10.1109/ivmc.1995.486988 ◽

2002 ◽

Author(s):

M. Takai ◽

T. Kishimoto ◽

M. Yamashita ◽

H. Morimoto

Keyword(s):

Focused Ion Beam ◽

Ion Beam ◽

Beam Irradiation ◽

Ion Beam Irradiation ◽

Field Emitter ◽

Emitter Array ◽

Field Emitter Array

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Energy spread measurement of electrons from field emitter array for ion beam neutralization

IEEE/CPMT/SEMI. 28th International Electronics Manufacturing Technology Symposium (Cat. No.03CH37479) ◽

10.1109/ivmc.2003.1223101 ◽

2004 ◽

Author(s):

J. Ishikawa ◽

Y. Gotoh ◽

K. Nakamura ◽

H. Tsuji ◽

K. Matsuda ◽

...

Keyword(s):

Ion Beam ◽

Energy Spread ◽

Field Emitter ◽

Emitter Array ◽

Field Emitter Array

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Emission characteristics of ZrN thin film field emitter array fabricated by ion beam assisted deposition technique

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.589916 ◽

1998 ◽

Vol 16 (2) ◽

pp. 829 ◽

Author(s):

M. Nagao

Keyword(s):

Thin Film ◽

Ion Beam ◽

Emission Characteristics ◽

Deposition Technique ◽

Field Emitter ◽

Ion Beam Assisted Deposition ◽

Emitter Array ◽

Field Emitter Array

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