Nozzleless Acoustic Droplet Ejector With Electrically Tunable Droplet Size for Picking and Placing Semiconductor Chips

2021 ◽  
pp. 1-9
Author(s):  
Yongkui Tang ◽  
Eun Sok Kim
Keyword(s):  
Droplet Size ◽  
Semiconductor Chips ◽  
Droplet Ejector

Growth kinetics of Al2Cu in an Al-1.5Cu thin film by in Situ TEM

1993 ◽  
Vol 51 ◽  
pp. 1172-1173
Author(s):  
M. Park ◽  
S.J. Krause ◽  
S.R. Wilson
Keyword(s):  
Thin Film ◽  
In Situ Tem ◽  
Collector Plate ◽  
Transmission Electron ◽  
Device Processing ◽  
Corrosion Susceptibility ◽  
Precipitation Phenomena ◽  
Semiconductor Chips ◽  
Kinetics Of

Cu alloying in Al interconnection lines on semiconductor chips improves their resistance to electromigration and hillock growth. Excess Cu in Al can result in the formation of Cu-rich Al2Cu (θ) precipitates. These precipitates can significantly increase corrosion susceptibility due to the galvanic action between the θ-phase and the adjacent Cu-depleted matrix. The size and distribution of the θ-phase are also closely related to the film susceptibility to electromigration voiding. Thus, an important issue is the precipitation phenomena which occur during thermal device processing steps. In bulk alloys, it was found that the θ precipitates can grow via the grain boundary “collector plate mechanism” at rates far greater than allowed by volume diffusion. In a thin film, however, one might expect that the growth rate of a θ precipitate might be altered by interfacial diffusion. In this work, we report on the growth (lengthening) kinetics of the θ-phase in Al-Cu thin films as examined by in-situ isothermal aging in transmission electron microscopy (TEM).

DROPLET SIZE DISTRIBUTIONS OF ADJUVANT-AMENDED SPRAYS FROM AN AIR-ASSISTED FIVE-PORT PWM NOZZLE

2011 ◽  
Vol 21 (3) ◽  
pp. 263-274 ◽  
Author(s):  
Jiabing Gu ◽  
Heping Zhu ◽  
Weimin Ding ◽  
Hong Young Jeon
Keyword(s):  
Droplet Size ◽  
Size Distributions ◽  
Droplet Size Distributions

MODELING DROPLET SIZE DISTRIBUTION NEAR A NOZZLE OUTLET IN AN ICING WIND TUNNEL

2006 ◽  
Vol 16 (6) ◽  
pp. 673-686 ◽  
Author(s):  
Laszlo E. Kollar ◽  
Masoud Farzaneh ◽  
Anatolij R. Karev
Keyword(s):  
Wind Tunnel ◽  
Size Distribution ◽  
Droplet Size ◽  
Droplet Size Distribution ◽  
Nozzle Outlet

CONVERSION OF DROPLET SIZE DISTRIBUTIONS FROM PMS OPTICAL ARRAY PROBE TO MALVERN LASER DIFFRACTION

2002 ◽  
Vol 12 (1-3) ◽  
pp. 267-282 ◽  
Author(s):  
Milton E. Teske ◽  
Harold W. Thistle ◽  
Andrew J. Hewitt ◽  
I. W. Kirk
Keyword(s):  
Droplet Size ◽  
Laser Diffraction ◽  
Size Distributions ◽  
Array Probe ◽  
Droplet Size Distributions
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