Influence of oxygen diffusion through capping layers of low work function metal gate electrodes

2006 ◽  
Vol 27 (4) ◽  
pp. 228-230 ◽  
Author(s):  
Bei Chen ◽  
R. Jha ◽  
H. Lazar ◽  
N. Biswas ◽  
Jaehoon Lee ◽  
...  
Keyword(s):  
Work Function ◽  
Oxygen Diffusion ◽  
Metal Gate Electrodes ◽  
Metal Gate ◽  
Gate Electrodes

Work function and thermal stability of Ti1−xAlxNy for dual metal gate electrodes

2002 ◽  
Vol 81 (22) ◽  
pp. 4192-4194 ◽  
Author(s):  
Tae-Ho Cha ◽  
Dae-Gyu Park ◽  
Tae-Kyun Kim ◽  
Se-Aug Jang ◽  
In-Seok Yeo ◽  
...  
Keyword(s):  
Thermal Stability ◽  
Work Function ◽  
Metal Gate Electrodes ◽  
Metal Gate ◽  
Gate Electrodes ◽  
Dual Metal ◽  
Thermal Stability Of

Work Function and Effective Oxide Thickness Engineering via Alloying of Metal Gate Electrodes

2019 ◽  
Vol 16 (5) ◽  
pp. 3-10 ◽  
Author(s):  
Jamie Schaeffer ◽  
Mark Raymond ◽  
David Gilmer ◽  
Rich Gregory ◽  
Bill Taylor ◽  
...  
Keyword(s):  
Work Function ◽  
Oxide Thickness ◽  
Metal Gate Electrodes ◽  
Metal Gate ◽  
Gate Electrodes

Bilayer metal gate electrodes with tunable work function: Mechanism and proposed model

2010 ◽  
Vol 107 (6) ◽  
pp. 063710 ◽  
Author(s):  
Ching-Huang Lu ◽  
Gloria M. T. Wong ◽  
Ryan Birringer ◽  
Reinhold Dauskardt ◽  
Michael D. Deal ◽  
...  
Keyword(s):  
Work Function ◽  
Metal Gate Electrodes ◽  
Metal Gate ◽  
Function Mechanism ◽  
Gate Electrodes ◽  
Proposed Model

Bilayer metal gate electrodes with tunable work function: Adhesion and interface characterization

2010 ◽  
Vol 108 (5) ◽  
pp. 053704 ◽  
Author(s):  
Ryan P. Birringer ◽  
Ching-Huang Lu ◽  
Michael Deal ◽  
Yoshio Nishi ◽  
Reinhold H. Dauskardt
Keyword(s):  
Work Function ◽  
Metal Gate Electrodes ◽  
Metal Gate ◽  
Interface Characterization ◽  
Gate Electrodes

Impact of Carbon Incorporation on the Effective Work Function of WN and TaN Metal Gate Electrodes

2008 ◽  
Vol 11 (7) ◽  
pp. H182 ◽  
Author(s):  
H. N. Alshareef ◽  
M. Quevedo-Lopez ◽  
H. C. Wen ◽  
C. Huffman ◽  
M. El-Bouanani ◽  
...  
Keyword(s):  
Work Function ◽  
Metal Gate Electrodes ◽  
Metal Gate ◽  
Carbon Incorporation ◽  
Effective Work ◽  
Effective Work Function ◽  
Gate Electrodes

scholarly journals Stability of Ru- and Ta-based metal gate electrodes in contact with dielectrics for Si-CMOS

2004 ◽  
Vol 241 (10) ◽  
pp. 2253-2267 ◽  
Author(s):  
Zhiqiang Chen ◽  
Veena Misra ◽  
Ryan P. Haggerty ◽  
Susanne Stemmer
Keyword(s):  
Metal Gate Electrodes ◽  
Metal Gate ◽  
Gate Electrodes

Influence of Metal Gate Electrodes on Electrical Properties of Atomic-Layer-Deposited Al-Rich HfAlO/Ga2O3 MOSCAPs

2020 ◽  
Vol 67 (4) ◽  
pp. 1730-1736
Author(s):  
Hongpeng Zhang ◽  
Lei Yuan ◽  
Xiaoyan Tang ◽  
Jichao Hu ◽  
Jianwu Sun ◽  
...  
Keyword(s):  
Electrical Properties ◽  
Atomic Layer ◽  
Metal Gate Electrodes ◽  
Metal Gate ◽  
Gate Electrodes
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