A Fully-Automated Electron Beam Test System for VLSI Circuits

1985 ◽  
Vol 2 (5) ◽  
pp. 74-82 ◽  
Author(s):  
Norio Kuji ◽  
Teruo Tamama ◽  
Takao Yano
Scanning ◽  
1987 ◽  
Vol 9 (5) ◽  
pp. 201-204 ◽  
Author(s):  
M. Brunner ◽  
D. Winkler ◽  
R. Schmitt ◽  
B. Lischke

1987 ◽  
Vol 7 (2-4) ◽  
pp. 267-274 ◽  
Author(s):  
F. Komatsu ◽  
M. Miyoshi ◽  
T. Sano ◽  
K. Okumura
Keyword(s):  

1996 ◽  
Vol 31 (1-4) ◽  
pp. 319-330 ◽  
Author(s):  
Koji Nakamae ◽  
Katsuyoshi Miura ◽  
Hiromu Fujioka

Author(s):  
Jongchul Lee ◽  
Youngheum Yeon ◽  
Huisu Kim ◽  
Seunghyun Lee ◽  
Jongseo Chai

1991 ◽  
Vol 14 (3-4) ◽  
pp. 197-205 ◽  
Author(s):  
A. Khursheed ◽  
A.R. Dinnis ◽  
P.D. Smart
Keyword(s):  

2021 ◽  
Vol 52 (4) ◽  
pp. 663-668
Author(s):  
V. A. Baskov ◽  
S. A. Bulychjov ◽  
Yu. F. Krechetov ◽  
V. V. Kulikov ◽  
M. A. Martemianov ◽  
...  

1990 ◽  
Vol 12 (1-4) ◽  
pp. 121-128 ◽  
Author(s):  
Hermann Harbeck ◽  
Roland Reinl ◽  
Peter Keβler ◽  
Siegfried Görlich

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