High speed electron-beam testing of VLSI circuits by backscattered electron detection

An electron microscope of the type normally used for analysis has been employed as an experimental beam writing instrument. With this instrument less than 10 nm size structures have been fabricated in a variety of materials by electron beam lithography. The important parameters that determine the resolution limit are: electron beam probe size, electron beam energy, characteristics of the beam sensitive material and the nature of the substrate. These parameters were studied with a Philips 400 T TEM/STEM/SEM modified for external beam control and interfaced to a DEC MINC 11-23 computer for pattern generation. With this microscope's ability to image thick samples by secondary and backscattered electron detection conventional type lithography was done on semiconductor substrates. The general lithographic technique is described, for example, in reference 2. In addition fabrication techniques on thin films were studied. The effect of the resolution determining parameters and several examples of lithographic results are described in this paper.

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Immediate development of processing windows for selective electron beam melting using layerwise monitoring via backscattered electron detection

Materials Letters ◽

10.1016/j.matlet.2019.03.048 ◽

2019 ◽

Vol 249 ◽

pp. 70-72 ◽

Cited By ~ 10

Author(s):

Christoph R. Pobel ◽

Christopher Arnold ◽

Fuad Osmanlic ◽

Zongwen Fu ◽

Carolin Körner

Keyword(s):

Electron Beam ◽

Electron Beam Melting ◽

Selective Electron Beam Melting ◽

Electron Detection ◽

Backscattered Electron

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Image quality vs data obtainment in biological electron microscopy

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100141950 ◽

1986 ◽

Vol 44 ◽

pp. 42-43

Author(s):

J. E. Johnson

Keyword(s):

Electron Microscopy ◽

Endoplasmic Reticulum ◽

Electron Beam ◽

Image Quality ◽

High Speed ◽

Early Period ◽

Early Years ◽

Fluorescent Screen ◽

Embedding Medium

In the early years of biological electron microscopy, scientists had their hands full attempting to describe the cellular microcosm that was suddenly before them on the fluorescent screen. Mitochondria, Golgi, endoplasmic reticulum, and other myriad organelles were being examined, micrographed, and documented in the literature. A major problem of that early period was the development of methods to cut sections thin enough to study under the electron beam. A microtome designed in 1943 moved the specimen toward a rotary “Cyclone” knife revolving at 12,500 RPM, or 1000 times as fast as an ordinary microtome. It was claimed that no embedding medium was necessary or that soft embedding media could be used. Collecting the sections thus cut sounded a little precarious: “The 0.1 micron sections cut with the high speed knife fly out at a tangent and are dispersed in the air. They may be collected... on... screens held near the knife“.

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