A Magnetic-Polymer-Based Passive Pressure Sensor Realized with a Foldable Parylene Substrate

A novel reentrant cavity-microstrip patch antenna integrated wireless passive pressure sensor was proposed in this paper for high temperature applications. The reentrant cavity was analyzed from aspects of distributed model and equivalent lumped circuit model, on the basis of which an optimal sensor structure integrated with a rectangular microstrip patch antenna was proposed to better transmit/receive wireless signals. In this paper, the proposed sensor was fabricated with high temperature resistant alumina ceramic and silver metalization with weld sealing, and it was measured in a hermetic metal tank with nitrogen pressure loading. It was verified that the sensor was highly sensitive, keeping stable performance up to 300 kPa with an average sensitivity of 981.8 kHz/kPa at temperature 25°C, while, for high temperature measurement, the sensor can operate properly under pressure of 60–120 kPa in the temperature range of 25–300°C with maximum pressure sensitivity of 179.2 kHz/kPa. In practical application, the proposed sensor is used in a method called table lookup with a maximum error of 5.78%.

Download Full-text

Design and Manufacturing of a Passive Pressure Sensor Based on LC Resonance

Micromachines ◽

10.3390/mi7050087 ◽

2016 ◽

Vol 7 (5) ◽

pp. 87 ◽

Cited By ~ 10

Author(s):

Cheng Zheng ◽

Wei Li ◽

An-Lin Li ◽

Zhan Zhan ◽

Ling-Yun Wang ◽

...

Keyword(s):

Pressure Sensor ◽

Passive Pressure ◽

Design And Manufacturing

Download Full-text

Phase Interrogation Used for a Wireless Passive Pressure Sensor in an 800 °C High-Temperature Environment

Sensors ◽

10.3390/s150202548 ◽

2015 ◽

Vol 15 (2) ◽

pp. 2548-2564 ◽

Cited By ~ 8

Author(s):

Huixin Zhang ◽

Yingping Hong ◽

Ting Liang ◽

Hairui Zhang ◽

Qiulin Tan ◽

...

Keyword(s):

High Temperature ◽

Pressure Sensor ◽

Passive Pressure ◽

Temperature Environment ◽

Phase Interrogation ◽

High Temperature Environment

Download Full-text

An LC Wireless Passive Pressure Sensor Based on Single-Crystal MgO MEMS Processing Technique for High Temperature Applications

Sensors ◽

10.3390/s21196602 ◽

2021 ◽

Vol 21 (19) ◽

pp. 6602

Author(s):

Pinggang Jia ◽

Jia Liu ◽

Jiang Qian ◽

Qianyu Ren ◽

Guowen An ◽

...

Keyword(s):

High Temperature ◽

Pressure Sensor ◽

Elevated Temperatures ◽

Applied Pressure ◽

Processing Technique ◽

Substrate Material ◽

Passive Pressure ◽

Passive Sensing ◽

Practical Engineering ◽

First Time

An LC wireless passive pressure sensor based on a single-crystalline magnesium oxide (MgO) MEMS processing technique is proposed and experimentally demonstrated for applications in environmental conditions of 900 °C. Compared to other high-temperature resistant materials, MgO was selected as the sensor substrate material for the first time in the field of wireless passive sensing because of its ultra-high melting point (2800 °C) and excellent mechanical properties at elevated temperatures. The sensor mainly consists of inductance coils and an embedded sealed cavity. The cavity length decreases with the applied pressure, leading to a monotonic variation in the resonant frequency of the sensor, which can be retrieved wirelessly via a readout antenna. The capacitor cavity was fabricated using a MgO MEMS technique. This MEMS processing technique, including the wet chemical etching and direct bonding process, can improve the operating temperature of the sensor. The experimental results indicate that the proposed sensor can stably operate at an ambient environment of 22–900 °C and 0–700 kPa, and the pressure sensitivity of this sensor at room temperature is 14.52 kHz/kPa. In addition, the sensor with a simple fabrication process shows high potential for practical engineering applications in harsh environments.

Download Full-text

A multi-frequency wireless passive pressure sensor for TPMS applications

2009 Asia Pacific Conference on Postgraduate Research in Microelectronics & Electronics (PrimeAsia) ◽

10.1109/primeasia.2009.5397439 ◽

2009 ◽

Author(s):

Xiaomu Wang ◽

Changjian Zhou ◽

Zhaohua Zhang ◽

Tianling Ren ◽

Litian Liu

Keyword(s):

Pressure Sensor ◽

Passive Pressure

Download Full-text

A wireless passive pressure sensor based on aperture coupled microstrip patch antenna

Sensor Review ◽

10.1108/sr-05-2017-0076 ◽

2018 ◽

Vol 38 (2) ◽

pp. 156-162 ◽

Cited By ~ 2

Author(s):

YanJie Guo ◽

QiuLin Tan ◽

Fei Lu ◽

GuoZhu Wu ◽

Lei Zhang

Keyword(s):

High Temperature ◽

Pressure Sensor ◽

Patch Antenna ◽

Base Material ◽

Microstrip Patch Antenna ◽

Resistant Material ◽

Content Type ◽

Microstrip Patch ◽

Passive Pressure ◽

Sensor Structure

Purpose This paper aims to present a novel wireless passive pressure sensor based on an aperture coupled microstrip patch antenna embedded with an air cavity for pressure measurement. Design/methodology/approach In this paper, the sensitive membrane deformed when pressure was applied on the surface of the sensor and the relative permittivity of the mixed substrate changed, resulting in a change in the center frequency of the microstrip antenna. The size of the pressure sensor is determined by theoretical calculation and software simulation. Then, the sensor is fabricated separately as three layers using printed circuit board technology and glued together at last. The pressure test of the sensor is carried out in a sealed metal tank. Findings The extracted resonant frequency was found to monotonically shift from 2.219 to 1.974 GHz when the pressure varied from 0 to 300 kPa, leading to an average absolute sensitivity of 0.817 MHz/kPa. Research limitations/implications This pressure sensor proposed here is mainly to verify the feasibility of this wireless passive maneuvering structure, and when the base material of this structure is replaced with some high-temperature-resistant material, the sensor can be used to measure the pressure inside the aircraft engine. Originality/value The sensor structure proposed here can be used to test the pressure in a high-temperature environment when the base material is replaced with some high-temperature-resistant material.

Download Full-text