Reusable TiN Substrate for Surface Plasmon Resonance Heterodyne Phase Interrogation Sensor

A TiN-based substrate with high reusability presented high-sensitivity refractive index measurements in a home-built surface plasmon resonance (SPR) heterodyne phase interrogation system. TiN layers with and without additional inclined-deposited TiN (i-TiN) layers on glass substrates reached high bulk charge carrier densities of 1.28 × 1022 and 1.91 × 1022 cm−3, respectively. The additional 1.4 nm i-TiN layer of the nanorod array presented a detection limit of 6.1 × 10−7 RIU and was higher than that of the 46 nm TiN layer at 1.2 × 10−6 RIU when measuring the refractive index of a glucose solution. Furthermore, the long-term durability of the TiN-based substrate demonstrated by multiple processing experiments presented a high potential for various practical sensing applications.

Polarimetric-Phase-Enhanced Intensity Interrogation Scheme for Surface Wave Optical Sensors with Low Optical Loss

A polarimetric-phase-enhanced intensity interrogation scheme leveraging the polarization-dependent sharp phase change induced by the surface wave excitation at a low-optical-loss sensor’s surface is proposed and experimentally demonstrated. Based on a simple setup with no moving parts during interrogation, a polarimetric-phase-enhanced intensity can be obtained by subtracting the reflected intensities of two beam polarization states. Our results show a ~4-fold sensitivity increase compared to traditional intensity detection schemes for similar sensors. As novel surface wave optical sensors are designed and engineered with optimized phase responses, this scheme offers a low-complexity solution for such devices instead of traditional phase interrogation schemes.