Micromachined SU-8 Probe Integrated with Film-bulk-acoustic Resonant Mass Sensor

2006 ◽  
Author(s):  
Hao Zhang ◽  
Wei Pang ◽  
Eun Sok Kim
Keyword(s):  
Mass Sensor ◽  
Film Bulk

scholarly journals Processing Chip for Thin Film Bulk Acoustic Resonator Mass Sensor

2012 ◽  
Vol 2012 ◽  
pp. 1-5
Author(s):  
Pengcheng Jin ◽  
Shurong Dong ◽  
Hao Jin ◽  
Mengjun Wu
Keyword(s):  
Thin Film ◽  
Acoustic Resonator ◽  
Mass Sensor ◽  
Film Bulk Acoustic Resonator ◽  
Film Bulk

Highly sensitive mass sensor using film bulk acoustic resonator

2008 ◽  
Vol 147 (2) ◽  
pp. 425-429 ◽  
Author(s):  
Re-Ching Lin ◽  
Ying-Chung Chen ◽  
Wei-Tsai Chang ◽  
Chien-Chuan Cheng ◽  
Kuo-Sheng Kao
Keyword(s):  
Acoustic Resonator ◽  
Mass Sensor ◽  
Highly Sensitive ◽  
Film Bulk Acoustic Resonator ◽  
Film Bulk

Mercury Ion Sensing by Film-Bulk-Acoustic-Resonator Mass Sensor

2006 ◽  
Author(s):  
Hao Zhang ◽  
M.S. Marma ◽  
Eun Sok Kim ◽  
C.E. McKenna ◽  
M.E. Thompson
Keyword(s):  
Acoustic Resonator ◽  
Mercury Ion ◽  
Mass Sensor ◽  
Ion Sensing ◽  
Film Bulk Acoustic Resonator ◽  
Film Bulk

Film Bulk Acoustic Resonators for Parallel Mass Sensing

2011 ◽  
Vol 1348 ◽  
Author(s):  
Shih-Jui Chen ◽  
Anderson Lin ◽  
Lukas Baumgartel ◽  
Eun Sok Kim
Keyword(s):  
Protein Detection ◽  
Mass Loading ◽  
Mass Sensor ◽  
Mass Sensing ◽  
Resonant Frequencies ◽  
Liquid Environment ◽  
Acoustic Resonators ◽  
Film Bulk Acoustic Resonators ◽  
Film Bulk ◽  
Array Sensing

ABSTRACTThis paper describes the principle of array sensing with film bulk acoustic resonators (FBARs) for combinatory mass sensing and the use of the arrayed FBAR resonant mass sensor for parallel detection of protein-ligand reactions in liquid environment. Various ligands were immobilized on the gold layer on the FBAR’s sensing surface for selective protein detection. The FBARs of the arrayed FBAR were fabricated to have different resonant frequencies from one another by adding slightly varied amount of mass loading on the resonators. Results showed that the arrayed FBAR could detect specific bindings on its surfaces as the concentration of the target ligand was varied.

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