Fabrication of a novel micro liquid flow sensor using a TaN thin film

2009 ◽  
Author(s):  
C.K. Chung ◽  
T. C. Chen ◽  
T.R. Shih ◽  
W. T. Chang
Keyword(s):  
Thin Film ◽  
Liquid Flow ◽  
Flow Sensor

Single-walled carbon nanotube network/poly composite thin film for flow sensor

2010 ◽  
Vol 16 (6) ◽  
pp. 955-959 ◽  
Author(s):  
Hui Cao ◽  
Zhiyin Gan ◽  
Qiang Lv ◽  
Han Yan ◽  
Xiaobin Luo ◽  
...  
Keyword(s):  
Thin Film ◽  
Carbon Nanotube ◽  
Composite Thin Film ◽  
Flow Sensor ◽  
Single Walled Carbon Nanotube ◽  
Single Walled Carbon ◽  
Carbon Nanotube Network

scholarly journals Micro Coriolis MASS flow sensor driven by integrated PZT thin film actuators

2018 ◽  
Author(s):  
Y. Zeng ◽  
J. Groenesteijn ◽  
D. Alveringh ◽  
R.J.A. Steenwelle ◽  
K. Ma ◽  
...  
Keyword(s):  
Thin Film ◽  
Mass Flow ◽  
Flow Sensor ◽  
Pzt Thin Film ◽  
Mass Flow Sensor

Fabrication flaws and reliability in MEMS thin film polycrystalline flow sensor

2013 ◽  
Vol 20 (1) ◽  
pp. 1-7 ◽  
Author(s):  
M. T. Bensidhoum ◽  
M. Laghrouche ◽  
A. Sidi Said ◽  
L. Montes ◽  
J. Boussey
Keyword(s):  
Thin Film ◽  
Flow Sensor

Monolithic flow sensor for measuring millilitre per minute liquid flow

1992 ◽  
Vol 33 (3) ◽  
pp. 143-153 ◽  
Author(s):  
Canqian Yang ◽  
Henrik Søeberg
Keyword(s):  
Liquid Flow ◽  
Flow Sensor
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