2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS)
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9781728116105

Author(s):  
Takeshi Hayasaka ◽  
Liwei Lin ◽  
Vernalyn C. Copa ◽  
Lorenzo P. Lopez ◽  
Regine A. Loberternos ◽  
...  

Author(s):  
Anming Gao ◽  
Martin Winterkorn ◽  
Yansong Yang ◽  
Ruochen Lu ◽  
J Provine ◽  
...  

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