Design and fabrication of micro hot-wire flow sensor using 0.35μm CMOS MEMS technology

The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) ◽

10.1109/nems.2014.6908810 ◽

2014 ◽

Author(s):

Zhuonan Miao ◽

Christopher Y. H. Chao ◽

Yi Chiu ◽

Chia-Wei Lin ◽

Yi-Kuen Lee

Keyword(s):

Flow Sensor ◽

Hot Wire ◽

Mems Technology ◽

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Micromachined thermal flow sensor based on CMOS MEMS technology

10.14711/thesis-991012532159503412 ◽

2017 ◽

Author(s):

Wei Xu

Keyword(s):

Flow Sensor ◽

Thermal Flow ◽

Thermal Flow Sensor ◽

Mems Technology ◽

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A Three-Dimensional Integrated Micro Calorimetric Flow Sensor in CMOS MEMS Technology

IEEE Sensors Letters ◽

10.1109/lsens.2019.2893151 ◽

2019 ◽

Vol 3 (2) ◽

pp. 1-4 ◽

Author(s):

Wei Xu ◽

Bo Wang ◽

Mingzheng Duan ◽

Moaaz Ahmed ◽

Amine Bermak ◽

...

Keyword(s):

Three Dimensional ◽

Flow Sensor ◽

Mems Technology ◽

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Low-cost temperature-compensated thermoresistive micro calorimetric flow sensor by using 0.35μm CMOS MEMS technology

2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) ◽

10.1109/memsys.2016.7421590 ◽

2016 ◽

Author(s):

Wei Xu ◽

Bo Gao ◽

Shenhui Ma ◽

Anping Zhang ◽

Yi Chiu ◽

...

Keyword(s):

Low Cost ◽

Flow Sensor ◽

Mems Technology ◽

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High Sensitivity and Wide Dynamic Range Thermoresistive Micro Calorimetric Flow Sensor With CMOS MEMS Technology

IEEE Sensors Journal ◽

10.1109/jsen.2019.2961948 ◽

2020 ◽

Vol 20 (8) ◽

pp. 4104-4111 ◽

Author(s):

Wei Xu ◽

Xiaoyi Wang ◽

Yi Chiu ◽

Yi-Kuen Lee

Keyword(s):

Dynamic Range ◽

High Sensitivity ◽

Flow Sensor ◽

Wide Dynamic Range ◽

Mems Technology ◽

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Self-Heated Thermoresistive Flow Sensor Coated with Parylene-C for Reliability Enhancement by Using 0.35µM CMOS MEMS Technology

2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) ◽

10.1109/transducers.2019.8808379 ◽

2019 ◽

Author(s):

Wei Xu ◽

Xiaoyi Wang ◽

Basant Mousa ◽

Maria Paszkiewicz ◽

Yi-Kuen Lee

Keyword(s):

Flow Sensor ◽

Mems Technology ◽

Cmos Mems ◽

Reliability Enhancement

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A self-packaged thermal flow sensor by CMOS MEMS technology

Proceedings. 7th International Conference on Solid-State and Integrated Circuits Technology, 2004. ◽

10.1109/icsict.2004.1435163 ◽

2005 ◽

Author(s):

Dong-hui Gao ◽

Ming Qin ◽

Hai-yang Chen ◽

Qing-an Huang

Keyword(s):

Flow Sensor ◽

Thermal Flow ◽

Thermal Flow Sensor ◽

Mems Technology ◽

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A self-packaged thermal flow sensor by CMOS MEMS technology

Proceedings of IEEE Sensors, 2004. ◽

10.1109/icsens.2004.1426311 ◽

2006 ◽

Author(s):

Dong-Hui Gao ◽

Ming Qin ◽

Hai-Yang Chen ◽

Qing-An Huang

Keyword(s):

Flow Sensor ◽

Thermal Flow ◽

Thermal Flow Sensor ◽

Mems Technology ◽

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Highly Sensitive 2D Thermoresistive Micro Calorimetric Flow Sensor by Using $0.35\boldsymbol{\mu}\mathbf{m}$ CMOS MEMS Technology

2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) ◽

10.1109/memsys.2019.8870857 ◽

2019 ◽

Author(s):

Wei Xu ◽

Ruijie Wang ◽

Xiaoyi Wang ◽

Basant Mousa ◽

Yi-Kuen Lee

Keyword(s):

Flow Sensor ◽

Highly Sensitive ◽

Mems Technology ◽

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Design of 40-GHz CRLH-TL chip antenna using 0.35-µm CMOS-MEMS technology

2010 IEEE Radio and Wireless Symposium (RWS) ◽

10.1109/rws.2010.5434248 ◽

2010 ◽

Author(s):

Chun-Chi Lin ◽

Chia-Chan Chang ◽

Sheng-Chi Hsieh

Keyword(s):

Mems Technology ◽

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A wafer-level encapsulated CMOS MEMS thermoresistive calorimetric flow sensor with integrated packaging design

2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) ◽

10.1109/memsys.2017.7863577 ◽

2017 ◽

Author(s):

Wei Xu ◽

Bo Gao ◽

Moaaz Ahmed ◽

Mingzheng Duan ◽

Bo Wang ◽

...

Keyword(s):

Flow Sensor ◽

Wafer Level ◽

Packaging Design ◽

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