Characterization of an Asymmetrical Capacitive MEMS Tilt Sensor

2021 IEEE 16th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) ◽

10.1109/nems51815.2021.9451287 ◽

2021 ◽

Author(s):

Y. Gao ◽

X. Zhang ◽

Y. Qi ◽

H. Zhang ◽

M. Ryutaro ◽

...

Keyword(s):

Tilt Sensor ◽

Capacitive Mems

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A high-resolution area-change-based capacitive MEMS tilt sensor

Sensors and Actuators A Physical ◽

10.1016/j.sna.2020.112191 ◽

2020 ◽

Vol 313 ◽

pp. 112191

Author(s):

Kang Rao ◽

Huafeng Liu ◽

Xiaoli Wei ◽

Wenjie Wu ◽

Chenyuan Hu ◽

...

Keyword(s):

High Resolution ◽

Area Change ◽

Tilt Sensor ◽

Capacitive Mems

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Characterization of RAL bipedal robot capacitive MEMS accelerometer using electrical impedance measurements

TENCON 2012 IEEE Region 10 Conference ◽

10.1109/tencon.2012.6412251 ◽

2012 ◽

Author(s):

Francis B. Malit ◽

Manuel C. Ramos

Keyword(s):

Electrical Impedance ◽

Bipedal Robot ◽

Impedance Measurements ◽

Mems Accelerometer ◽

Capacitive Mems

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Design and characterization of a tunable patch antenna loaded with capacitive MEMS switch using CSRRs structure on the patch

Alexandria Engineering Journal ◽

10.1016/j.aej.2016.05.002 ◽

2016 ◽

Vol 55 (3) ◽

pp. 2621-2630 ◽

Author(s):

Rajesh Saha ◽

Santanu Maity ◽

Chandan Tilak Bhunia

Keyword(s):

Patch Antenna ◽

Mems Switch ◽

Capacitive Mems

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Time-Domain Modeling and Characterization of Capacitive MEMS Switches

2005 IEEE Instrumentationand Measurement Technology Conference Proceedings ◽

10.1109/imtc.2005.1604483 ◽

2006 ◽

Author(s):

A. Boni ◽

G. Fontana ◽

F. Pianegiani

Keyword(s):

Time Domain ◽

Domain Modeling ◽

Mems Switches ◽

Time Domain Modeling ◽

Capacitive Mems

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Design, Fabrication, and Characterization of a Readout Integrated Circuit (ROIC) for Capacitive MEMS Sensors

2007 IEEE Sensors ◽

10.1109/icsens.2007.4388386 ◽

2007 ◽

Author(s):

MyungLae Lee ◽

SungSik Lee ◽

SungHae Jung ◽

ChangHan Je ◽

Gunn Hwang ◽

...

Keyword(s):

Integrated Circuit ◽

Mems Sensors ◽

Readout Integrated Circuit ◽

Fabrication And Characterization ◽

Capacitive Mems

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Real-time characterization of dielectric charging in contactless capacitive MEMS

Analog Integrated Circuits and Signal Processing ◽

10.1007/s10470-014-0458-y ◽

2014 ◽

Vol 82 (3) ◽

pp. 559-569 ◽

Author(s):

Manuel Dominguez-Pumar ◽

Sergi Gorreta ◽

Joan Pons-Nin ◽

Elena Blokhina ◽

Panagiotis Giounanlis ◽

...

Keyword(s):

Real Time ◽

Dielectric Charging ◽

Capacitive Mems

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Characterization of capacitive MEMS resonators via nonlinear open-loop frequency responses

2015 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) ◽

10.1109/dtip.2015.7161022 ◽

2015 ◽

Author(s):

A. Brenes ◽

J. Juillard ◽

L. Bourgois ◽

F. Vinci dos Santos

Keyword(s):

Open Loop ◽

Frequency Responses ◽

Mems Resonators ◽

Capacitive Mems

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Electro-mechanical modelling and experimental characterization of a high-aspect-ratio electrostatic-capacitive MEMS device

Sensors and Actuators A Physical ◽

10.1016/j.sna.2017.07.048 ◽

2017 ◽

Vol 266 ◽

pp. 219-231 ◽

Author(s):

F. Cerini ◽

M. Ferrari ◽

V. Ferrari ◽

A. Russo ◽

M. Azpeitia Urquia ◽

...

Keyword(s):

Aspect Ratio ◽

High Aspect Ratio ◽

Experimental Characterization ◽

Mechanical Modelling ◽

Mems Device ◽

Capacitive Mems

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Characterization of multipoint diffraction strain and tilt sensor based on moiré interferometer and multichannel imaging position-sensitive detector

Review of Scientific Instruments ◽

10.1063/1.2372732 ◽

2006 ◽

Vol 77 (11) ◽

pp. 113110 ◽

Author(s):

Salman Iqbal ◽

Anand Asundi

Keyword(s):

Position Sensitive Detector ◽

Sensitive Detector ◽

Position Sensitive ◽

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Characterization of a quarts MEMS tilt sensor with 0.001º precision

TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference ◽

10.1109/sensor.2009.5285503 ◽

2009 ◽

Author(s):

Jinxing Liang ◽

Fusao Kohsaka ◽

Xuefeng Li ◽

Ken Kunitomo ◽

Toshitsugu Ueda

Keyword(s):

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