Electro-mechanical modelling and experimental characterization of a high-aspect-ratio electrostatic-capacitive MEMS device
2017 ◽
Vol 266
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pp. 219-231
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2009 ◽
Vol 224
(5)
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pp. 777-794
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2012 ◽
Vol 22
(5)
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pp. 055021
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2006 ◽
2010 ◽
Vol 2010
(1)
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pp. 000703-000706
Keyword(s):
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2006 ◽
Vol 179
(3)
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pp. 708-715
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2007 ◽
Vol 27
(2-3)
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pp. 1023-1027
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2001 ◽
Vol 19
(3)
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pp. 916
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