A Resonant Differential Pressure Sensor Based on Bulk Silicon Technology

Author(s):  
Chao Cheng ◽  
Yadong Li ◽  
Yulan Lu ◽  
Chao Xiang ◽  
Jian Chen ◽  
...  
Sensor Review ◽  
2020 ◽  
Vol 40 (5) ◽  
pp. 529-534
Author(s):  
Igor S. Nadezhdin ◽  
Aleksey G. Goryunov

Purpose Differential pressure is an important technological parameter, one urgent task of which is control and measurement. To date, the lion’s share of research in this area has focused on the development and improvement of differential pressure sensors. The purpose of this paper is to develop a smart differential pressure sensor with improved operational and metrological characteristics. Design/methodology/approach The operating principle of the developed pressure sensor is based on the capacitive measurement principle. The measuring unit of the developed pressure sensor is based on a differential capacitive sensitive element. Programmable system-on-chip (PSoC) technology has been used to develop the electronics unit. Findings The use of a differential capacitive sensitive element allows the unit to compensate for the influence of interference (for example, temperature) on the measurement result. With the use of PSoC technology, it is also possible to increase the noise immunity of the developed smart differential pressure sensor and provide an unparalleled combination of flexibility and integration of analog and digital functionality. Originality/value The use of PSoC technology in the developed smart differential pressure sensor has many indisputable advantages, as the size of the entire circuit can be minimized. As a result, the circuit has improved noise immunity. Accordingly, the procedure for debugging and changing the software of the electronics unit is simplified. These features make development and manufacturing cost effective.


2018 ◽  
Vol 280 ◽  
pp. 125-131 ◽  
Author(s):  
Umesh P. Borole ◽  
Sasikala Subramaniam ◽  
Ishan R. Kulkarni ◽  
P. Saravanan ◽  
Harish C. Barshilia ◽  
...  

2020 ◽  
Vol 67 (2) ◽  
pp. 640-645 ◽  
Author(s):  
Yadong Li ◽  
Yulan Lu ◽  
Bo Xie ◽  
Jian Chen ◽  
Junbo Wang ◽  
...  

2017 ◽  
Vol 35 (9) ◽  
pp. 660-663
Author(s):  
Hidetoshi Takahashi ◽  
Isao Shimoyama

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