scholarly journals Electron acceleration in relativistic plasma waves generated by a single frequency short-pulse laser

Author(s):  
C.A. Coverdale ◽  
C.B. Darrow ◽  
C.D. Decker ◽  
W.B. Mori ◽  
K.-C. Tzeng ◽  
...  
2003 ◽  
Vol 10 (6) ◽  
pp. 2468-2474 ◽  
Author(s):  
M. Y. Yu ◽  
Wei Yu ◽  
Z. Y. Chen ◽  
J. Zhang ◽  
Y. Yin ◽  
...  

2004 ◽  
Vol 70 (5) ◽  
pp. 625-634 ◽  
Author(s):  
LIHUA CAO ◽  
WEI YU ◽  
HAN XU ◽  
CHUNYANG ZHENG ◽  
ZHANJUN LIU ◽  
...  

Author(s):  
F. Beaudoin ◽  
P. Perdu ◽  
C. DeNardi ◽  
R. Desplats ◽  
J. Lopez ◽  
...  

Abstract Ultra-short pulse laser ablation is applied to IC backside sample preparation. It is contact-less, non-thermal, precise and can ablate the various types of material present in IC packages. This study concerns the optimization of ultra-short pulse laser ablation for silicon thinning. Uncontrolled silicon roughness and poor uniformity of the laser thinned cavity needed to be tackled. Special care is taken to minimize the silicon RMS roughness to less than 1µm. Application to sample preparation of 256Mbit devices is presented.


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