Electron heating reduction in inductively coupled plasma at conditions of the anomalous skin effect

2003 ◽  
Author(s):  
Yu.O. Tyshetskiy ◽  
A.I. Smolyakov ◽  
V.A. Godyak
Keyword(s):  
Inductively Coupled Plasma ◽  
Skin Effect ◽  
Electron Heating ◽  
Inductively Coupled ◽  
Anomalous Skin Effect

Global model for pulsed inductively coupled plasma sources: Effect of edge-to-center density ratio and electron heating

2020 ◽  
Vol 27 (7) ◽  
pp. 073507
Author(s):  
Deuk-Chul Kwon ◽  
Dong-Hun Yu ◽  
Hyoungcheol Kwon ◽  
Yeon Ho Im ◽  
Hyo-Chang Lee
Keyword(s):  
Inductively Coupled Plasma ◽  
Density Ratio ◽  
Global Model ◽  
Electron Heating ◽  
Plasma Sources ◽  
Inductively Coupled ◽  
Center Density

Anomalous skin effect and collisionless power dissipation in inductively coupled discharges

2001 ◽  
Vol 89 (7) ◽  
pp. 3580-3589 ◽  
Author(s):  
G. Cunge ◽  
B. Crowley ◽  
D. Vender ◽  
M. M. Turner
Keyword(s):  
Power Dissipation ◽  
Skin Effect ◽  
Inductively Coupled ◽  
Anomalous Skin Effect
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